Capacitive three-dimensional force sensor with adjustable range

Abstract

The invention discloses a capacitive three-dimensional force sensor with an adjustable range, which is simple to operate, has high resolution and belongs to the technical field of sensors. The sensorcomprises an elastic carrier, a protective shell, a sealing end cover, a movable capacitor plate, a fixed capacitor plate, an adjusting cushion block, a stud, a differential nut and a dial, a groove is formed in the middle of the elastic carrier to form a cross-shaped groove and a cross-shaped beam structure; the cross-shaped groove is formed in the cross-shaped beam in a crossed manner; the movable capacitor plate and the fixed capacitor plate form a capacitance sensor; the movable capacitor plate and the fixed capacitor plate are respectively bonded on the cross-shaped groove and an adjusting cushion block, the adjusting cushion block is fixedly connected with the stud, a stud external thread and a differential nut internal thread form a differential thread pair, a differential nut external thread and an elastic carrier internal thread form a differential thread pair, and the rotary dial is connected with the differential nut external thread in a matching way; and the force measurement sensitivity and range of the sensor are obtained according to the initial distance between the fixed capacitor plate and the movable capacitor plate.

Description

technical field [0001] The invention relates to a three-dimensional force sensor, in particular to a capacitive three-dimensional force sensor with adjustable measuring range, which belongs to the technical field of sensors. Background technique [0002] With the rapid development of the robotics industry, intelligent robots have received widespread attention from industry and academia. Among them, the multi-dimensional force sensor is an important medium for intelligent robots to perceive the external environment and contact objects, and is an indispensable key component for the development of intelligent robots. At present, according to the measurement principle, multi-dimensional force sensors are mainly divided into resistance strain type, piezoelectric type, and capacitive type. Piezoelectric sensors have high rigidity and good dynamic characteristics, but it is difficult to test static force for a long time. Strong and other advantages, but due to its own test princi...

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Problems solved by technology

There will be limitations to the external environment and objects that the robot perceives changes. If multiple sensors are installed, the cost will be greatly increased, and the installation process will be complicated. Therefore, it is necessary to develop a multi-dimensional force sensor with adjustable range and sensitivity.

There are not many capacitive sensors with adjustable range and sensitivity. Chinese patent CN 107063517A "a torque sensor based on capacitive edge effect" adjusts the initial distance between the dynamic and static plates of the capacitor through the outer ring structure of the sensor to realize the adjustable range and sensitivity of the sensor. Adjustment, but the measuring device can only measure and adjust the torque in one direction, and the operation is complicated and the adjustability is poor

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