Rocker arm type polishing device and method for full-caliber deterministic polishing of planar part

Abstract

The invention discloses a rocker arm type polishing device and method for full-caliber deterministic polishing of a planar part. The device comprises a control system, a base, a lifting plate, a polishing module and a measuring module; the polishing module and the measuring module are both located on the base; the lifting plate is located between the polishing module and the measuring module; thepolishing module comprises a rocker arm mechanism, a polishing pad surface finishing mechanism, a polishing pad surface shape measuring device and an annular polishing tool disc mechanism; and the measuring module comprises an automatic planar part surface shape measuring device and a mechanical arm mechanism. According to the rocker arm type polishing device and method for full-caliber deterministic polishing of the planar part, the specific surface shape of the planar part is fully taken into account, a planar part surface material removal rate distribution function and the planar part surface form a normalized mirror symmetry relationship by controlling the planar part surface material removal rate distribution function, deterministic polishing of the planar part is achieved, and efficient convergence of the planar part surface shape in the polishing process is guaranteed. The high-precision polishing process is completed by adopting the low-cost operation mode, and the equipment cost is reduced.

Description

Technical field [0001] The invention relates to the technical field of polishing, in particular to a rocker type polishing device and method suitable for full-caliber deterministic polishing of planar parts. Background technique [0002] Optical systems are widely used in aerospace, national defense and military, space exploration, and astronomical optical observation. In the engineering optics field of ultraviolet optics, strong light optics, short-wave optics, far-infrared wave optics, etc., plane parts are usually used as imaging elements such as transmission elements, reflective elements, diffraction elements, or other functional elements. With the continuous development and application of optical technology, the requirements for the manufacturing technology of optical components continue to increase. On the one hand, the precision requirements of optical components are continuously increasing. On the other hand, as the demand for optical systems increases, the number of req...

AI Technical Summary

Problems solved by technology

[0009] (1) The specific surface shape of the plane part is not fully considered, but the tool disk is only flattened, resulting in a slower convergence speed of the plane part surface shape during the polishing process;

[0010] (2) The flattening equipment of the polishing pad adopts a static pressure device, resulting in higher equipment costs;

[0011] (3) Adopting the method of opening grooves on the polishing pad to carry out full-bore deterministic polishing has a low utilization rate of the polishing pad, resulting in higher processing costs;

[0012] (4) The trimming of the polishing pad by some devices only achieves the removal of the glazed layer, and lacks the ability to control the overall surface shape of the polishing pad;

[0013] (5) The current polishing equipment has not realized the integrated design of processing and measurement, resulting in insufficient automatic batch manufacturing capacity of planar parts

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