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Submerged air jet driven polishing equipment and polishing method

An immersion and equipment technology, applied in the field of precision ultra-precision non-contact sub-aperture polishing, can solve the problems of effective polishing of difficult free-form surfaces, high polishing and maintenance costs, clogging of small-diameter nozzles, etc., to achieve low continuous polishing, low cost, The effect of low energy consumption

Active Publication Date: 2020-11-20
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, small-caliber nozzles are prone to clogging, which affects process stability
[0004] In summary, the existing high-precision polishing methods are difficult to effectively polish free-form surfaces, especially the inner surfaces and grooves of complex cavities, and the equipment complexity is high, and the polishing and maintenance costs are high. There is an urgent need for a simple equipment. , low cost, stable and controllable process, and high-quality, ultra-precision sub-aperture polishing technology that can achieve surface correction

Method used

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  • Submerged air jet driven polishing equipment and polishing method
  • Submerged air jet driven polishing equipment and polishing method
  • Submerged air jet driven polishing equipment and polishing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] refer to figure 1 , In this embodiment, the submerged air jet drives ultra-precision polishing, and the workpiece and the nozzle are simultaneously immersed in the polishing solution, and the nozzle and the surface of the workpiece are kept at an appropriate distance (details are shown in the table below, the same below). During the polishing process, the pressurized gas (air jet) overflowing from the nozzle drives the abrasive particles in the polishing liquid near the residence point to undergo shearing motion with the surface of the workpiece, thus forming a flexible polishing head. The nozzle and the workpiece move relatively, which can realize Polishing along the specified path. The pressurized gas here is provided by an external adjustable pressure pump.

[0053] The polishing liquid is a Newtonian polishing liquid composed of cerium oxide and water.

[0054] The pressurized gas is filtered air.

[0055] Table 1 lists the high-efficiency and high-quality polish...

Embodiment 2

[0061] refer to figure 1 , In this embodiment, the immersion air jet drives the ultra-precision polishing, and the workpiece and the nozzle are immersed in the polishing liquid at the same time, and the nozzle and the surface of the workpiece are kept at an appropriate distance. During the polishing process, the pressurized gas (air jet) overflowing from the nozzle drives the abrasive particles in the polishing liquid near the residence point to undergo shearing motion with the surface of the workpiece, thus forming a flexible polishing head. The nozzle and the workpiece move relatively, which can realize Polishing along the specified path. The pressurized gas here is provided by an external adjustable pressure pump.

[0062] The polishing liquid is a Newtonian polishing liquid composed of corundum and water, and contains sulfuric acid with a concentration of 1.5%.

[0063] The pressurized gas is nitrogen.

[0064] Table 2 lists the high-efficiency and high-quality polishin...

Embodiment 3

[0070] refer to figure 1 , In this embodiment, the immersion air jet drives the ultra-precision polishing, and the workpiece and the nozzle are immersed in the polishing liquid at the same time, and the nozzle and the surface of the workpiece are kept at an appropriate distance. During the polishing process, the pressurized gas (air jet) overflowing from the nozzle drives the abrasive particles in the polishing liquid near the residence point to undergo shearing motion with the surface of the workpiece, thus forming a flexible polishing head. The nozzle and the workpiece move relatively, which can realize Polishing along the specified path. The pressurized gas here is provided by an external adjustable pressure pump.

[0071] The polishing liquid is a Newtonian polishing liquid composed of alumina and water.

[0072] The pressurized gas is nitrogen.

[0073] Table 3 lists the high-efficiency and high-quality polishing conditions driven by the submerged air jet in this embod...

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Abstract

The invention discloses immersion type air jet driving polishing equipment and polishing method. The polishing equipment comprises a container, a nozzle and an air source, wherein the container comprises a working cavity and used for containing polishing liquid in the working cavity and immersing a workpiece and the nozzle during working; the nozzle comprises an air jet port, is arranged in the working cavity and immersed in the polishing liquid above the workpiece in the working state, and forms an air jet flow towards the surface of the workpiece through the air jet port; and the air sourceis connected to the air jet port of the nozzle and used for supplying gas to the nozzle to form the air jet flow from the air jet port. The invention belongs to flexible non-contact polishing, and high-precision high-quality polishing of various free curved surfaces, especially the inner surface of a complex cavity can be achieved.

Description

technical field [0001] The invention belongs to the precision ultra-precision non-contact sub-aperture polishing technology, and relates to a submerged air jet-driven ultra-precision polishing equipment and method, in particular to high-efficiency and ultra-precision polishing equipment and polishing methods for free-form surfaces and complex cavity inner surfaces . Background technique [0002] In recent years, the demand for aspheric and free-form surfaces has been increasing day by day in fields such as aerospace, military, cutting-edge medical care, and daily commodities. These surfaces often combine functionality and convenience. Especially in the field of optics, there are extremely strict requirements for optical components in the full frequency range to reduce scattering and improve imaging quality. In addition, the industrial molds of modern industrial products often have complex inner cavities, channels and grooves, which pose a severe challenge to their high-pre...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24C1/08B24C5/04B24C7/00B24C9/00
CPCB24C1/08B24C5/04B24C7/00B24C9/00
Inventor 韩艳君张雷樊成安东尼-布康朱吴乐
Owner SUZHOU UNIV
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