Method for polishing ion beam with high-gradient mirror surface

An ion beam, high steepness technology, used in grinding/polishing equipment, optical surface grinders, grinders, etc., can solve the problems of high processing cost, difficulty in dwell time control and accurate calculation, and high processing difficulty. The effect of generality

Inactive Publication Date: 2010-12-01
NAT UNIV OF DEFENSE TECH
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Problems solved by technology

In order to improve the machining accuracy of high-steep optical parts, it is often necessary to adjust the attitude of the ion source according to the profile of the mirror surface, and it is difficult to control and accurately calculate the dwell time. High-precision optical parts are processed, the processing is difficult and the processing cost is high

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  • Method for polishing ion beam with high-gradient mirror surface
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  • Method for polishing ion beam with high-gradient mirror surface

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Embodiment

[0064] A method for ion beam polishing of a high-steep mirror surface of the present invention, comprising the following steps:

[0065] (1) Measuring the angle of incidence: take a workpiece to be polished with a high-steep mirror surface, the workpiece to be polished is a convex spherical mirror with a vertex radius of curvature of 16mm and a diameter of 21.3mm, the maximum angle of incidence is 41.7°, and its f value is 0.75, establish an X-Y rectangular coordinate system in a plane perpendicular to the optical axis of the workpiece, and calculate the angle between the normal line of each processing point on the mirror surface and the vertically incident ion beam according to the surface equation z=h(x, y) of the high-steep mirror surface , that is, the incident angle θ;

[0066] (2) Determine the compensation coefficient distribution: according to the model P(x, y)=(1 / n)Y 0 (θ)cosθf(xcosθ, y) determines that the compensation coefficient of each processing point of the wor...

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Abstract

The invention discloses a method for polishing an ion beam with a high-gradient mirror surface. The method comprises the following steps of: (1) measuring incidence angles theta of all points on the mirror surface; (2) confirming a compensation factor K of each point according to a model; (3) measuring an initial surface error E of a workpiece by utilizing interferometry; (4) compensating the E according to the K to acquire a compensation surface error E'; (5) acquiring a removal function R of an ion beam in the vertical incidence of the mirror surface through removal function experiment; (6) confirming residence time distribution T and generating a numerical control code according to E' and R; (7) processing by utilizing a generating device of the removal function and the generated numerical control code, enabling the ion beam to enter the mirror surface along a direction parallel to the optical axis direction of the workpiece in processing and trimming the mirror surface through a triaxiality linkage system; and (8) repeating the steps until the trimming result satisfies the requirement of surface convergence accuracy. The method of the invention has the advantages of simple operation, good stability, high processing accuracy, strong controllability, low requirement for equipment, and the like in processing the high-gradient mirror surface.

Description

technical field [0001] The invention relates to the technical field of optical element processing, in particular to an ion beam polishing method for a high-steep mirror surface. Background technique [0002] With the continuous development of modern technology, especially the rapid improvement of the performance of aerospace and weapon systems, optical systems used in various fields have higher and higher requirements for the accuracy and shape of key components. Such key optical components usually have high steepness characteristics, which can reduce the weight and volume of the system, simplify the structure of the system, and improve and optimize the overall performance of the system at the same time. For example, the hemispherical resonator in the hemispherical resonant gyroscope, the spherical rotor and spherical bowl in the electrostatic levitation gyroscope, and the lithography objective lens of the lithography machine, etc., the core components of the optical system ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B13/00
CPCH01J2237/3174
Inventor 廖文林戴一帆周林陈善勇解旭辉郑子文
Owner NAT UNIV OF DEFENSE TECH
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