Advanced treatment and recycling system and process for fluorine-containing wastewater in electronic industry
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A technology of advanced treatment and electronics industry, applied in the field of water treatment, it can solve the problems of inability to realize the recycling and reuse of fluorine-containing wastewater, and it is difficult to take into account the treatment effect and economy. To achieve the effect of recycling
Pending Publication Date: 2020-06-12
CHINA ELECTRONICS INNOVATION ENVIRONMENTAL TECH CO LTD
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[0008] The present invention proposes a system and process for the advanced treatment and reuse of fluorine-containing wastewater in the electronics industry. It is difficult to take into account the treatment effect and economy, and at the same time, it is impossible to realize the recycling and reuse of fluorine-containing wastewater. To provide a method that can effectively reduce the cost of chemical dosing, reduce the consumption of resin, save energy and reduce consumption, and finally realize the reuse of wastewater. Fluorine-containing wastewater advanced treatment process
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Embodiment 1
[0054] Water quality of fluorine-containing wastewater in a semiconductor factory: pH is 1.5~3, F is 300~400mg / L, TDS is 250~300mg / L, wastewater flow rate is 3000m 3 / d. The implementation of this case includes the following steps:
[0055] The first step: adjust the pH to 7, and enter the multi-media filter and activated carbon filter. Before the multi-layer filter, there are pH adjustment, bactericide dosing unit and coagulant dosing unit. The fluorine-containing wastewater filtered by the activated carbon filter then flows into the softening resin tower, and the hardness of the fluoride-containing wastewater is less than 1 mg / L at this time.
[0056] Step 2: Filter the effluent into the RO system. The final water production rate is 77-78%. The concentrated water produced by RO enters the high-concentration fluorine-containing wastewater treatment system, and the RO effluent is reused to the front-end pure water system.
[0057] The third step: the reverse osmosis concentr...
Embodiment 2
[0061] Water quality of fluorine-containing wastewater in a panel factory: pH is 2~3, F is 200~300mg / L, TDS is 500~600mg / L, wastewater flow rate is 2000m 3 / d. The implementation of this case includes the following steps:
[0062] The first step: adjust the pH to 7, and enter the multi-media filter and activated carbon filter. Before the multi-layer filter, there are pH adjustment, bactericide dosing unit and coagulant dosing unit. The fluorine wastewater then flows into the softening resin tower, at this time the hardness of the fluorine wastewater is less than 1mg / L.
[0063] Step 2: Filter the effluent into the RO system, the final water production rate is 75%, the concentrated water produced by RO enters the high-concentration fluorine-containing wastewater treatment system, and the RO effluent is reused to the front-end pure water system.
[0064] The third step: the reverse osmosis concentrated water adjusts the pH to 7 and then enters the first-stage calcification mix...
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Abstract
The invention relates to an advanced treatment and recycling system and process for fluorine-containing wastewater in the electronic industry. The system comprises an adjusting tank, a first multi-medium filter, an activated carbon filter, a softening device, a filtering water tank, a security filter, an RO system, a fluorine-containing wastewater temporary storage tank, a high-concentration fluorine-containing wastewater primary chemical mixing system, a high-concentration fluorine-containing wastewater secondary deep fluorine removal system, a second multi-medium filter, a fluorine removal resin tower and a discharge tank which are sequentially connected through pipelines, the adjusting tank is connected with a fluorine-containing wastewater inlet pipe, and the discharge tank is connected with a standard-meeting discharge pipe. The process comprises the following steps: 1, fluorine-containing wastewater adjusting; 2, reverse osmosis filtering; 3, high-concentration fluorine-containing wastewater primary chemical mixing; 4, secondary deep defluorination of the high-concentration fluorine-containing wastewater; and 5, fluorine removal using a resin. The advanced treatment and recycling of the fluorine-containing wastewater in the electronic industry are realized by adopting a process of combining RO concentration, two-stage chemical mixing, addition of a fluorine removal agentand fluorine removal resin.
Description
technical field [0001] The invention relates to a technology for the advanced treatment of fluorine-containing wastewater in the electronics industry, in particular to a system and process for the advanced treatment and reuse of fluorine-containing wastewater in the electronics industry, and belongs to the technical field of water treatment. Background technique [0002] In the production process of products in the electronics industry (such as semiconductors, panels, photovoltaics, etc.), due to the use of materials such as hydrofluoric acid and ammonium fluoride in pickling operations and wet etching processes, wastewater containing fluoride ions will be generated. This kind of fluorine-containing wastewater is usually the second and third cleaning water of the process, which has the characteristics of large water volume, less impurities, and acidic influent (pH is about 1-3). [0003] In the prior art, fluoride ions in water are often removed by adding calcified mixed sed...
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