External quantum efficiency detection system of light-emitting part under micro-area and detection method thereof

Abstract

The invention provides an external quantum efficiency detection system of a light-emitting part under a micro-area and a detection method thereof. The detection system comprises a receiving light path, calibration equipment and a third detection device, wherein the receiving light path includes a first microscope objective and a first detection device for measuring light intensity, and the first detection device is aligned with a rear end of the first microscope objective; the calibration equipment is used for acquiring a response function of the receiving light path; the calibration equipmentincludes a light source, a light gathering piece used for gathering light rays on a focal plane of the first microscope objective, a conduction piece used for guiding the light rays with different frequencies into a front end of the first microscope objective, and a second detection device used for measuring spectral intensity distribution of the light rays with the different frequencies on the focal plane, the first end of the light gathering piece is aligned with the light source, the second end of the light gathering piece is aligned with the focal plane, and the conduction piece is arranged on the focal plane; and the third detection device is used for detecting a current of a to-be-detected light-emitting part. A problem that a traditional external quantum efficiency detection deviceis poor in accuracy when the device is used for detecting a single-pixel or submillimeter-level micro-size light-emitting device is solved.

Description

technical field [0001] The invention relates to the technical field of detection of light-emitting parts, in particular to an external quantum efficiency detection system and a detection method of a light-emitting part under a micro-area. Background technique [0002] External quantum efficiency is one of the important parameters used to characterize light-emitting devices. [0003] In recent years, with the continuous development of electronic technology, people's requirements for high-performance flat-panel displays have been continuously improved. Smaller single-pixel size and lower energy consumption have always been the pursuit of the light-emitting device industry. Existing optimization methods usually improve the external quantum efficiency of light-emitting devices from the design of device materials and processing technology, or through the design of micro-nano structures. [0004] In the early stage of research and development of improving the external quantum eff...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the defects existing in the existing technology, an external quantum efficiency detection system and detection method of light-emitting parts under the micro-area are provided to solve the problem of detecting single-pixel or submillimeter-level micro-sized by traditional external quantum efficiency detection devices. The problem of poor accuracy when emitting devices

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