External quantum efficiency detection system of light-emitting part under micro-area and detection method thereof

A technology of external quantum efficiency and detection system, which is applied in the field of external quantum efficiency detection system of light-emitting parts in micro-area, can solve problems such as poor accuracy, and achieve the effects of improving receiving efficiency, efficiency and accuracy

Pending Publication Date: 2020-06-23
SHANGHAI IDEAOPTICS CORP LTD
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  • Description
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  • Application Information

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Problems solved by technology

[0005] In order to overcome the defects existing in the existing technology, an external quantum efficiency detection system and detection method of light-emitting parts under the micro-area are prov

Method used

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  • External quantum efficiency detection system of light-emitting part under micro-area and detection method thereof
  • External quantum efficiency detection system of light-emitting part under micro-area and detection method thereof
  • External quantum efficiency detection system of light-emitting part under micro-area and detection method thereof

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Example

[0078] first embodiment

[0079] refer to Figure 1 to Figure 3 As shown in the figure, the external quantum efficiency detection system of the light-emitting element under the micro-area according to the embodiment of the present invention includes: a light source 21, a xenon lamp light source is selected to be matched with a monochromator, and a monochromatic light ranging from ultraviolet to near-infrared covering 250 nm to 1700 nm is provided; That is, the third microscope objective lens, the third microscope objective lens and the first microscope objective lens are the same microscope objective lens), which is used to connect the light of the light source and converge on the focal plane of the first microscope objective lens; the conduction part, Use an aluminum mirror with known absolute reflectivity R(λ); the receiving light path includes a first microscope objective lens, a coupling member 13 and a first detection device 12, and the first microscope objective lens is ...

Example

[0103] Second Embodiment

[0104] refer to figure 1 , figure 2 and Figure 4 As shown, the external quantum efficiency detection system of the light-emitting element under the micro-region according to the embodiment of the present invention includes:

[0105] The calibration device includes a light source, a light collecting part, a conducting part and a second detection device. The light source 21 is a white LED light source, providing a broad spectrum of light from ultraviolet to visible covering 380nm-700nm. The condenser is a second microscope objective lens, the rear end of the second microscope objective lens is aligned with the light source, the front end of the second microscope objective lens is aligned with the front end of the first microscope objective lens, and the first microscope objective lens and the second microscope objective lens are aligned with the light source. The focal planes of the objective lenses coincide. The first microscope objective is co...

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Abstract

The invention provides an external quantum efficiency detection system of a light-emitting part under a micro-area and a detection method thereof. The detection system comprises a receiving light path, calibration equipment and a third detection device, wherein the receiving light path includes a first microscope objective and a first detection device for measuring light intensity, and the first detection device is aligned with a rear end of the first microscope objective; the calibration equipment is used for acquiring a response function of the receiving light path; the calibration equipmentincludes a light source, a light gathering piece used for gathering light rays on a focal plane of the first microscope objective, a conduction piece used for guiding the light rays with different frequencies into a front end of the first microscope objective, and a second detection device used for measuring spectral intensity distribution of the light rays with the different frequencies on the focal plane, the first end of the light gathering piece is aligned with the light source, the second end of the light gathering piece is aligned with the focal plane, and the conduction piece is arranged on the focal plane; and the third detection device is used for detecting a current of a to-be-detected light-emitting part. A problem that a traditional external quantum efficiency detection deviceis poor in accuracy when the device is used for detecting a single-pixel or submillimeter-level micro-size light-emitting device is solved.

Description

technical field [0001] The invention relates to the technical field of detection of light-emitting parts, in particular to an external quantum efficiency detection system and a detection method of a light-emitting part under a micro-area. Background technique [0002] External quantum efficiency is one of the important parameters used to characterize light-emitting devices. [0003] In recent years, with the continuous development of electronic technology, people's requirements for high-performance flat-panel displays have been continuously improved. Smaller single-pixel size and lower energy consumption have always been the pursuit of the light-emitting device industry. Existing optimization methods usually improve the external quantum efficiency of light-emitting devices from the design of device materials and processing technology, or through the design of micro-nano structures. [0004] In the early stage of research and development of improving the external quantum eff...

Claims

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Application Information

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IPC IPC(8): G01N21/66G01J3/443
CPCG01J3/443G01N21/66
Inventor 洪少欣贺晓龙周燕飞殷海玮
Owner SHANGHAI IDEAOPTICS CORP LTD
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