Parallel color confocal flatness measuring system

Abstract

The invention discloses a parallel color confocal flatness measuring system. In the system, a spectroscope is arranged on an emergent light path of a multicolor light source; a flexible optical fiberbundle formed by a plurality of optical fibers arranged according to a set arrangement mode is arranged on an emergent light path of the spectroscope; a micro-dispersion lens array formed by a plurality of micro-dispersion lens units arranged according to a set arrangement mode is coupled with an emergent end of the flexible optical fiber bundle; an object to be measured is arranged on an emergentlight path of the micro-dispersion lens array such that the dispersed light with different wavelengths is focused at different positions; the object to be measured reflects light reaching a surface of the object to be measured to the spectroscope; a small hole array arranged according to a set arrangement mode is arranged on a reflection light path of the spectroscope so as to transmit light focused on a surface of an object to be measured; and a color camera shoots light penetrating the small hole array to obtain a color image, and then the flatness, the curvature and the warping degree of the surface of the object to be measured are determined. According to the invention, multi-point parallel measurement can be realized, and the measurement efficiency of the flatness of the object to bemeasured is improved.

Description

technical field [0001] The invention relates to the field of optical measurement, in particular to a parallel color confocal flatness measurement system. Background technique [0002] Flatness refers to the deviation of the macro-concave-convex height of the substrate from the ideal plane, and flatness measurement refers to the variation of the measured actual surface to its ideal plane. With the development of science and technology and the improvement of productivity, there is a great demand for the measurement of the flatness, curvature and warpage of objects in more and more fields, such as industrial manufacturing, construction engineering, aerospace and medical treatment. In the field of industrial manufacturing, it is necessary to test the flatness of some product parts to improve product quality, and analyze the product through the detection of flatness, curvature and warpage to verify whether the product meets the design requirements; in the field of construction en...

AI Technical Summary

Problems solved by technology

However, this solution has the following disadvantages: the solution can only achieve single-point measurement, parallel measurement cannot be achieved, the measurement efficiency is low, and the flatness of the object to be measured cannot be quickly measured

However, the existing color confocal technology is mostly single-point measurement technology, which cannot realize multi-point parallel measurement, and still has the disadvantages of low measurement efficiency and the inability to quickly measure the flatness of the object to be measured.

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