Provided is an appearance inspection
system capable of accurately detecting breakoff of a terminal
electrode (W1) of an
electronic component. This appearance inspection
system comprises: an inspection unit (100) provided with an illumination means that illuminates an inspection object (W), a conveyance means (1) that conveys the inspection object, and an imaging means (2); an inspection
control unit (200) provided with an
image acquisition unit (31) that uses, as an inspection image, an
image signal from the inspection object acquired by the imaging means, an
image processing unit (32) that performs
image processing on the inspection image, a determination unit (34) that determines the inspection image, and a
system control unit (35) that controls the illumination means, the conveyance means, and the imaging means; and a communication means (4) that connects the inspection unit and the inspection
control unit. The illumination means is composed of an upper surface illumination device (10) and a lower surface illumination device (20) which are disposed above and below the conveyance means, respectively, so as to face each other. The upper surface illumination device is provided with an opening (15) for capturing an image of the inspection object. Each of the upper surface illumination device and the lower surface illumination device is provided with a
first light source group which is disposed in a manner orthogonal to the conveyance direction of the conveyance means, a second
light source group which is disposed in a manner oblique to the conveyance direction of the conveyance means, and a third
light source group which is disposed in a manner horizontal to the conveyance direction of the conveyance means. The
light source arrangements of the
first light source group and the second light source group are in a mode in which red-
colored light sources and blue-
colored light sources are arranged in a staggered manner. The light source arrangement of the third light source group is in a mode in which only green-
colored light sources are arranged. The imaging means is disposed such that an imaging
optical axis (X) is at an
elevation angle (θ) of 5-60° with respect to the conveyance direction (A) of the conveyance means at an inspection position (P) on the conveyance means.