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Alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply

An automatic control and plasma technology, applied in the direction of plasma, output power conversion devices, electrical components, etc., can solve problems such as temperature rise, achieve average power supply, avoid voltage decline, and stabilize voltage

Active Publication Date: 2020-07-24
深圳市美泽电源技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the process of regulating the voltage of the plasma power supply, when the gas is converted into plasma, it needs to absorb a large amount of heat to raise the temperature to the dissociation temperature, and in this way, the power that the plasma power supply can provide will fluctuate to a certain extent. The invention provides an AC high-power MW level constant temperature and voltage regulation automatic control plasma power supply

Method used

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  • Alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply
  • Alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply
  • Alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply

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Embodiment 1

[0032] refer to Figure 1-4 . An AC high-power MW level constant temperature and voltage regulation automatic control plasma power supply, comprising: a three-phase power input device 1, a transformer box 2, a reaction box 3 and a gas control box 4, the three-phase power input device 1 is connected to the transformer A pressure box 2, the transformer box 2 is connected to the reaction box 3, and the reaction box 3 is connected to the gas control box 4.

[0033] The reaction box 3 includes a high-temperature heating device 5, several plasma reaction cabinets 6 and a first channel opening, the high-temperature heating device 5 is arranged on the inner sidewall of the reaction box 3, and the first channel opening is arranged on the reaction box On one side wall of the box 3, the plasma reaction cabinet 6 includes a closed ring pipe structure, the plasma reaction cabinet 6 is vertically arranged, and the plasma reaction cabinet 6 is vertically and evenly divided into a first area...

Embodiment 2

[0047] refer to Figure 1-4 . As a preferred mode of the present invention, the working gas box 12 is divided into several sub-working gas boxes 18, and the sub-working gas boxes 18 respectively store different working gases, and the sub-working gas boxes 18 pass through the sub-first A gas channel 19 is connected to said main first gas channel 14 .

[0048] As a preferred mode of the present invention, each sub-first gas channel 19 is provided with a proportional valve 20 , and the sub-first gas channel 19 is connected to the main first gas channel 14 through the proportional valve 20 .

[0049] As a preferred mode of the present invention, it also includes a load detector and a controller, the load detector is connected to the plasma power supply and the power supply output line of the plasma power supply, and the load detector detects the total amount of work load connected to the plasma power supply;

[0050] The controller is connected to the proportional valve 20 and t...

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Abstract

The invention relates to an alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply. The power supply comprises a three-phase power supplyinput device, a transformer box, a reaction box and a gas control box, wherein the reaction box includes a high-temperature heating device, a plurality of plasma reaction cabinets and a first channelopening, each plasma reaction cabinet is vertically and averagely divided into a first area and a second area, and each plasma reaction cabinet includes an air exchange opening, a relay, a pluralityof heating groups, a semiconductor working block and a polarization power supply; and the gas control box includes a working gas box and a protective gas box, and the working gas box is connected withthe air exchange opening through a main first gas channel. By mixing a working gas according to a certain proportion, the mixed gas added into the plasma reaction cabinet can quickly provide electricenergy and continuously provide electric energy so that the plasma power supply supplies power more evenly, and a power supply fluctuation is avoided.

Description

technical field [0001] The invention relates to the field of plasma power supplies, in particular to an AC high-power MW level constant temperature and voltage regulation automatic control plasma power supply. Background technique [0002] The high-frequency high-voltage power supply ionizes the gas in the channel, excites high-energy electrons, and the high-energy electrons collide with the exhaust gas molecules inelastically. When the energy is greater than the chemical bond energy of the exhaust gas molecules, the pollutants are decomposed, and the inelastic collisions also produce a large number of positive Negative ions, excited ions and free radicals, which react with exhaust gas molecules can also decompose pollutants. The low-temperature plasma treatment method has the advantages of high efficiency, low energy consumption, wide application range, and easy operation. Therefore, the use of plasma technology to treat toxic substances or difficult-to-degrade substances i...

Claims

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Application Information

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IPC IPC(8): H02M1/00H05H1/24
CPCH02M1/00H05H1/24
Inventor 黄笃莲
Owner 深圳市美泽电源技术有限公司