A six-degree-of-freedom geometric error measuring device and method for a linear guide rail

Abstract

The invention belongs to the technical field related to precision measurement of precision machining equipment, and discloses a linear guide rail six-degree-of-freedom geometric error measurement device and method, which includes a fixed unit and a measurement unit. The fixed unit includes a beam splitter, a 1 / 4 wave plate, a reflector mirror, which is used to split the laser beam into three beams of collimated parallel light; the fourth four-quadrant detector is used to receive interference fringes, and then realize the measurement of the position error of the linear guide; the measurement unit includes the first four-quadrant detector, the second four-quadrant detector The quadrant detector and the third four-quadrant detector, the first four-quadrant detector, the second four-quadrant detector and the third four-quadrant detector are respectively used to receive three beams of collimated parallel light; the moving components of the spot are separated to The horizontal straightness error, vertical straightness error, roll angle error, pitch angle error and yaw angle error of the linear guide are obtained. The invention improves the integration degree and measurement precision, and has strong applicability.

Description

technical field [0001] The invention belongs to the technical field related to precision measurement of precision machining equipment, and more specifically relates to a linear guide rail six-degree-of-freedom geometric error measurement device and method. Background technique [0002] Linear guide rails are widely used in precision CNC machine tools and precision measuring instruments. During the linear motion along the guide rail, there are six geometric errors in the guide rail due to the manufacturing and installation errors of the guide rail, which have a great impact on the processing quality and measurement accuracy. Therefore, it is of great significance to the error and compensation of the hexagonal motion of the guide rail. [0003] At present, the main measuring instruments often use commercial laser interferometers for single-item error measurement, but there are disadvantages such as complicated process, long time-consuming, low efficiency and high cost. Gratin...

AI Technical Summary

Problems solved by technology

[0003] At present, the main measuring instruments often use commercial laser interferometers for single-item error measurement, but there are disadvantages such as complicated process, long time-consuming, low efficiency and high cost.

Grating diffraction has good resolution and high measurement accuracy in angle error measurement, but it cannot measure position error and horizontal straightness error; laser alignment can realize angle error and straightness error measurement, but cannot realize position Error measurement, but the combination of laser alignment and laser interference generally has the disadvantages of complex device structure and crosstalk between various errors, which will have a great impact on measurement accuracy.

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