An image feedback multi-mems device piezoelectric automatic pick-and-place robot and its control method

Abstract

The invention belongs to the fields of micro-electromechanical integration technology and micro-nano technology, and in particular relates to an image feedback multi-MEMS device piezoelectric automatic pick-and-place robot and a control method thereof. The robot of the present invention includes a basic platform, on which a circumferential rotation unit, an automatic pick-and-place device, a piezoelectric adjustable sample table, and a liftable image detection unit are sequentially fixed from left to right, and the circumferential rotation unit, the automatic pick-and-place device , the piezoelectric adjustable sample stage and the liftable image detection unit enable the automatic pick-and-place device to smoothly pick up the MEMS devices placed on the circumferential rotation unit and transfer them to the piezoelectric adjustable sample On the stage, it has the advantages of automatic operation, high pick-and-place accuracy and high efficiency.

Description

technical field [0001] The invention belongs to the fields of micro-electromechanical integration technology and micro-nano technology, and in particular relates to an image feedback multi-MEMS device piezoelectric automatic pick-and-place robot and a control method thereof. Background technique [0002] Micro-electromechanical systems (MEMS) devices, as important and commonly used test devices in the field of micro-nano-scale testing, are widely used in the fields of micro-nano operation and measurement because of their relatively high test efficiency, high test accuracy, and high sensitivity. Generally speaking, according to different test tasks and application requirements, it will be necessary to replace MEMS devices with different functions multiple times. Therefore, the picking and placing operation of MEMS devices has become a decisive link to ensure the normal operation of MEMS devices. At present, the commonly used pick-and-place methods for replacing MEMS devices a...

AI Technical Summary

Problems solved by technology

At present, the commonly used pick-and-place methods for replacing MEMS devices are mostly manual methods. Although the purpose of pick-and-place can be achieved, due to the small size of the MEMS devices themselves, they are easily damaged during use, especially when the MEMS devices need to be picked and placed many times by hand. The probability of man-made damage is uncertain, which is not only time-consuming and labor-intensive, but also costly

In addition, manual pick-and-place replacement of multiple MEMS devices has problems such as low efficiency, poor pick-and-place effect, and low precision. Especially in some special occasions such as the occasions where the replacement time is strictly limited, it cannot meet complex research tasks to quickly perform multiple MEMS devices. Special requirements for accurate pick and place replacement

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