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A positioning vacuum coating equipment with controllable pattern size

A technology of vacuum coating and size, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems affecting the coating pattern and size, and achieve stable pattern and size, good thermal insulation effect. Effect

Active Publication Date: 2020-12-25
JIANGSU XINGGUANG PACKAGING SCI & TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the existing coating equipment, in order to reduce the manufacturing difficulty of the equipment, no preheating structure for the substrate is set in the equipment, and the temperature of the substrate is low before coating, which will affect the pattern and size of the coating

Method used

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  • A positioning vacuum coating equipment with controllable pattern size
  • A positioning vacuum coating equipment with controllable pattern size
  • A positioning vacuum coating equipment with controllable pattern size

Examples

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Embodiment Construction

[0048] The present invention will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.

[0049] In the description of the present invention, it needs to be explained that, belonging to "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, therefore, should not be construed as limiting the invention.

[0050] In the description of the present invention, it ...

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Abstract

The invention relates to the technical field of coating equipment, in particular to a positioning vacuum coating equipment with controllable pattern size, comprising: a vacuum coating chamber; a preheating space with a heating unit inside; a first outer wall of the vacuum coating chamber and an inner wall of the preheating space Adhesive setting, the first open end is arranged at intervals on the first outer wall, and the second open end is arranged at intervals on the inner wall; the vacuum coating chamber is rotated, when the first open end and the second open end are misplaced, The first vacuum chamber and the preheating chamber form two independent closed spaces, otherwise the first vacuum chamber and the preheating chamber form a connected closed space; a mobile unit is also included, in the first vacuum chamber and the preheating chamber Move workpieces between. In the present invention, through the setting of the preheating space, the workpiece can be preheated before entering the vacuum coating chamber, and the heat conduction can be realized through the inner wall and the first outer wall of the vacuum coating chamber during the preheating process, and the thermal insulation effect is good, which can ensure The pattern and size of the coating are controlled.

Description

technical field [0001] The invention relates to the technical field of vacuum coating equipment, in particular to a positioning vacuum coating equipment with controllable pattern size. Background technique [0002] The vacuum evaporation coating method is referred to as vacuum evaporation, which is a method of heating the raw material to be formed in the evaporation container in a vacuum chamber, making its atoms or molecules gasify and escape from the surface to form a vapor flow, and condense on the surface of the substrate to form a solid film. . This method has been used to create thin films for decades and is used in a variety of applications. However, there are many factors affecting the quality of the coating in vacuum evaporation coating, among which the temperature uniformity of the substrate is one of the influencing factors. [0003] In the existing coating equipment, in order to reduce the manufacturing difficulty of the equipment, there is no preheating struct...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
CPCC23C14/24
Inventor 廖香权陈忠彭義清陈教飞牛斌
Owner JIANGSU XINGGUANG PACKAGING SCI & TECH CO LTD