Teleport Manipulator
A technology of manipulators and wafers, which is applied in the direction of conveyor objects, electrical components, transportation and packaging, etc., and can solve the problems of high cost of wafer transmission and large investment in equipment
Active Publication Date: 2021-01-05
BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Problems solved by technology
The thickness of the wafer is different. In the related art, in the transfer manipulator used to transfer the wafer, one specification of the transfer manipulator is suitable for a kind of specification of the wafer. At present, there is no transfer manipulator that can transfer wafers of different specifications, so that the wafer The cost of round transmission is high, and the investment in equipment is large
Method used
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Embodiment approach
[0050] In one embodiment, refer to image 3 As shown, a group of power supply 8 is set, the positive end of power supply 8 is connected to the first lead 5, the negative end of power supply 8 is connected to the second lead 6; the reversing component is reversing switch 91, and the two ends of reversing switch 91 are respectively One wire 5 and the second wire 6, the reversing switch 91 is closed, the positive charge terminal 21 is connected to the positive terminal, the electronic terminal 22 is connected to the negative terminal; the reversing switch 91 is opened, the positive charge terminal 21 is connected to the negative terminal, and the electronic terminal 21 is connected to the negative terminal. 22 is connected to the positive terminal. By adjusting the power supply direction of the power supply 8 to the static electricity generator 2, the residual Coulomb force between the wafer and the static electricity generator 2 is eliminated, the transfer manipulator is prevent...
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The invention relates to the field of semiconductor processing technology, and provides a transfer manipulator, including: a substrate, a power supply, a static electricity generating device and a reversing component, the substrate includes a supporting part for supporting a wafer; the power supply includes a positive terminal and a negative terminal; the static electricity generating device Connected to the power supply, the static electricity generating device includes a positive charge terminal and an electronic terminal, both of which are set on the support part; the reversing part is arranged between the power supply and the static electricity generating device, and the reversing part is at the first state, the positive charge terminal is connected to the positive terminal, and the electronic terminal is connected to the negative terminal; the reversing component is in the second state, the positive charge terminal is connected to the negative terminal, and the electronic terminal is connected to the positive terminal. The transfer manipulator proposed by the present invention uses the Coulomb force to absorb the wafer, which can realize the transfer of wafers of various specifications, and can also eliminate the residual Coulomb force through the reversing parts, which can reduce production costs and reduce the impact on the wafer. damage.
Description
technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a transfer manipulator. Background technique [0002] A semiconductor refers to a material whose conductivity at room temperature is between that of a conductor and an insulator. There are many semiconductor products, and the manufacturing process is complicated. Wafers are silicon wafers used in the manufacture of silicon semiconductor integrated circuits. Wafer thickness varies greatly from fab to fab, and the contact area of the wafer contactor that contacts the wafer is required to be as small as possible to avoid defects and exposure problems. The thickness of the wafer is different. In the related art, in the transfer manipulator used to transfer the wafer, one specification of the transfer manipulator is suitable for a kind of specification of the wafer. At present, there is no transfer manipulator that can transfer wafers of different specifications, s...
Claims
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IPC IPC(8): H01L21/683H01L21/677
CPCH01L21/6831H01L21/6833H01L21/67736
Inventor 周亮
Owner BEIJING JINGYI AUTOMATION EQUIP CO LTD