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Surface treatment facility

A surface treatment and equipment technology, applied in the field of surface treatment equipment, can solve the problems of deterioration of steel plate surface smoothness, low adhesion between silicon phosphate and metal, and achieve the effect of uniform film thickness

Pending Publication Date: 2020-11-13
JFE STEEL CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the smoothness of the surface of the steel sheet is bound to deteriorate
[0006] In addition, since the adhesion between silicophosphate and metal is low, it is impossible to directly form a silicophosphate coating on the surface of a steel sheet that has been smoothed by removing the forsterite coating.

Method used

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Embodiment

[0093] Hereinafter, an Example is given and this invention is demonstrated concretely. However, the present invention is not limited thereto.

[0094]

[0095] The pre-conveyance coil 11 (total mass: 8 tons) of the grain-oriented electrical steel sheet S (thickness: 0.23mm) after the final annealing was supplied to the Figure 1 ~ Figure 4 The surface treatment equipment 1 described above was used for film formation. More specifically, first, the steel sheet S from which the forsterite coating has been removed by mechanical grinding is introduced into the pretreatment chamber 32, and impurities on the surface are removed by Ar ion sputtering.

[0096] Next, in the film formation chamber 42 , a TiN coating (target film thickness on one side: 0.4 μm) was formed on the surface of the steel sheet S by PVD using the target T. The PVD method adopts the ion plating method, and the film forming temperature is set at 500°C. The number of targets T per column was set to three. The...

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Abstract

Provided is a surface treatment facility in which both surfaces of a material subjected to coating are subjected to continuous film deposition by PVD as the material is conveyed in the longitudinal direction, wherein flutter of the material subjected to coating can be suppressed. The surface treatment facility has a chamber and continuously deposits a film by PVD on both surfaces of a material subjected to coating as the material is conveyed in the longitudinal direction through the chamber; is further provided with a conveyance mechanism for conveying the material subjected to coating and a blowing mechanism for blowing film-forming gas in the longitudinal direction on both sides of the material subjected to coating present in the chamber; and has an X / Y ratio within a range of 0.4 to 3.0where X is the film-forming gas blowing speed, wherein the unit of measurement is m / min, and Y is the conveyance speed of the material subjected to coating, wherein the unit of measurement is m / min.

Description

technical field [0001] The present invention relates to surface treatment equipment. Background technique [0002] Grain-oriented electrical steel sheets are soft magnetic materials that can be used as core materials for transformers, generators, and the like. A grain-oriented electrical steel sheet has a crystal structure in which the <001> orientation, which is the axis of easy magnetization of iron, is highly aligned in the rolling direction of the steel sheet. Such a texture is formed by the final annealing in the production process of the grain-oriented electrical steel sheet. In the final annealing, the {110}<001>-oriented crystal grains called the so-called Goss orientation are preferentially massively grown. High magnetic flux density and low iron loss are required as magnetic properties of grain-oriented electrical steel sheet products. [0003] The magnetic properties of a grain-oriented electrical steel sheet are improved by applying tensile stress (...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C23C14/56
CPCC23C14/54C23C14/56C23C14/228C23C14/562C23C14/32C23C14/542
Inventor 马田拓实新垣之启
Owner JFE STEEL CORP