Substrate transportation device, working method thereof, substrate processing system and processing method
A technology of transportation device and working method, which is applied in the directions of transportation and packaging, conveyor objects, optics, etc., which can solve the problems of decreased transmission speed, increased weight of the bearing platform, and inability to meet high-speed transmission, so as to meet high-speed transmission and ensure transmission speed Effect
Pending Publication Date: 2020-11-24
SKYVERSE TECH CO LTD
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Problems solved by technology
[0003] However, in the traditional substrate transportation device, the loading and unloading device is installed on the carrier platform, which increases the weight of the carrier platform and reduces the transmission speed, which cannot meet the requirements of high-speed transmission
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[0045] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the accompanying drawings in the embodiments of the application. Apparently, the described embodiments are only part of the embodiments of the application, not all of them. Based on the implementation manners in this application, all other implementation manners obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.
[0046] Please also refer to figure 1 , figure 2 and image 3 , figure 1 It is a schematic front view of the substrate transportation device 100 in an embodiment;
[0047] figure 2 Yes figure 1 A schematic structural view of the substrate transport device 100 and the substrate 200 shown;
[0048] image 3 It is a schematic top view of the substrate transportation device 100 in an embodiment.
[0049] An embodiment of the present applicatio...
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The invention provides a substrate transportation device, a substrate processing system and a working method of the substrate transportation device, the substrate transportation device comprises a supporting assembly and a bearing table, the bearing table is provided with a bearing surface, the bearing surface is configured to bear a substrate, and the bearing table is configured to drive the substrate to move relative to the supporting assembly along a first direction; the bearing table is provided with a through hole, the supporting assembly comprises a supporting column, and the supportingcolumn is configured to penetrate through the through hole and drive the base plate to move in the direction perpendicular to the bearing face so as to drive the base plate to be attached to the bearing face or enable the base plate to be away from the bearing face. According to the substrate transportation device, by arranging the supporting assembly, the feeding and discharging process of the substrate on the bearing table can be effectively completed, the supporting assembly is not fixedly connected with the bearing table, it can be effectively avoided that the weight of the bearing table is increased, the conveying speed of the bearing table is guaranteed, and therefore the requirement for high-speed conveying is met.
Description
technical field [0001] This field belongs to the technical field of liquid crystal panel manufacturing, and in particular relates to a substrate transport device and its working method, a substrate processing system and processing method. Background technique [0002] With the development of liquid crystal panel manufacturing technology and the increase of people's demand for large-screen LCD panels, the size and weight of the substrates that need to be used in the liquid crystal panel manufacturing process are getting larger and larger, making the handling process of the substrates more and more difficult. Traditional substrate transportation devices usually use a carrier platform to carry and transport the substrate, and at the same time use a loading and unloading device installed on the carrier platform to realize the loading and unloading process of the substrate. [0003] However, in the traditional substrate transportation device, the loading and unloading device is i...
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IPC IPC(8): H01L21/677H01L21/687G02F1/1333
CPCH01L21/67706H01L21/6773H01L21/67736H01L21/68778G02F1/1333
Inventor 陈鲁张新云庞芝亮王天民
Owner SKYVERSE TECH CO LTD