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A kind of preparation method of stretchable elastic cross metamaterial

A stretching elasticity, metamaterial technology, applied in the direction of antennas, electrical components, etc., can solve the problems of complex structure of terahertz switching devices, inability to curl and stretch, and single working frequency band.

Active Publication Date: 2022-02-15
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims to solve the technical problems that the existing terahertz switching devices are complex in structure, cannot be curled and stretched, and has a single working frequency band, and provides a method for preparing stretchable elastic cross metamaterials

Method used

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  • A kind of preparation method of stretchable elastic cross metamaterial
  • A kind of preparation method of stretchable elastic cross metamaterial
  • A kind of preparation method of stretchable elastic cross metamaterial

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specific Embodiment approach 1

[0024] Specific embodiment one: a kind of preparation method of stretchable elastic cross supermaterial, concretely carry out according to the following steps:

[0025] 1. Spin-coat the photoresist on the substrate, then pre-bake it on a hot stage, and expose it to ultraviolet light to form a sacrificial layer;

[0026] 2. Mix the PDMS main agent and curing agent evenly, vacuum defoam, then spin coat on the sacrificial layer, and cure to form a PDMS film;

[0027] 3. Magnetron sputtering metallic silver on the PDMS film formed in step 2 to form a silver layer;

[0028] 4. Spin-coat photoresist on the silver layer formed in step 3, then put it on the hot stage and bake before forming the photoresist layer;

[0029] 5. Use a photolithography machine to expose, transfer the required pattern to the photoresist layer formed in step 4 through the mask plate, put it on the hot table and bake it, and then develop it in the developer solution. pattern is required, and the rest of the...

specific Embodiment approach 2

[0032] Embodiment 2: This embodiment differs from Embodiment 1 in that: in step 1, the base material is glass, and it is ultrasonically cleaned with acetone, alcohol, and deionized water for 10 minutes before use. Others are the same as in the first embodiment.

specific Embodiment approach 3

[0033] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: in step 1, when the photoresist is spin-coated, the control speed is 4000 r / min, and the time is 50 s. Others are the same as in the first or second embodiment.

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Abstract

A preparation method of stretchable elastic cross metamaterial, and the invention relates to the preparation field of metamaterial. The invention solves the technical problems that the existing terahertz switching device has a complex structure, cannot be curled and stretched, and has a single operating frequency band. Method: spin-coat sacrificial layer on the substrate, magnetron sputtering metal silver to form silver layer; spin-coat photoresist, expose with photolithography machine, transfer the desired pattern to the photoresist layer formed in step 4 through a mask Above, the exposed silver layer was corroded by ferric nitrate solution, the PDMS mixture was spin-coated, and the sacrificial layer was dissolved by the dissolving solution. The invention prepares the cross metal metamaterial through the PDMS film forming process and the traditional photolithography technology, and uses the external stress to act on the PDMS substrate to change the macroscopic size of the sample, thereby changing the metamaterial period microscopically. The resonance frequency of the electric dipole and the surface Bloch mode resonance frequency are red-shifted with the increase of the period, so that the transmission intensity at the resonance frequency position increases. The invention is used for preparing stretchable elastic cross metamaterial.

Description

technical field [0001] The invention relates to the field of preparation of supermaterials. Background technique [0002] Terahertz waves are located between microwaves and infrared, and their unique spectral positions make terahertz waves have great potential in fields such as biomedicine, communication, and radar. In recent years, with the continuous upgrading of communication technology, the communication frequency band has gradually moved from microwave to millimeter wave, and the terahertz band has become the preemptive point of next-generation communication technology. As the core device of terahertz wave communication technology, terahertz switch plays an important role in controlling the transmission of terahertz signals. In addition, the current device design is developing towards miniaturization, ultra-thinning, and multi-function. The multi-band terahertz flexible switch can be applied to flexible devices and stretchable systems, and the synchronous modulation of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q15/00
CPCH01Q15/0086
Inventor 田浩王晶谭鹏周忠祥
Owner HARBIN INST OF TECH
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