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Preparation method of stretchable elastic cross-shaped metamaterial

A technology of tensile elasticity and metamaterials, applied in the direction of electrical components, antennas, etc., can solve problems such as inability to curl and stretch, single working frequency band, and complex structure of terahertz switching devices

Active Publication Date: 2020-12-04
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims to solve the technical problems that the existing terahertz switching devices are complex in structure, cannot be curled and stretched, and has a single working frequency band, and provides a method for preparing stretchable elastic cross metamaterials

Method used

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  • Preparation method of stretchable elastic cross-shaped metamaterial
  • Preparation method of stretchable elastic cross-shaped metamaterial
  • Preparation method of stretchable elastic cross-shaped metamaterial

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specific Embodiment approach 1

[0024] Specific embodiment one: a kind of preparation method of stretchable elastic cross supermaterial, concretely carry out according to the following steps:

[0025] 1. Spin-coat the photoresist on the substrate, then pre-bake it on a hot stage, and expose it to ultraviolet light to form a sacrificial layer;

[0026] 2. Mix the PDMS main agent and curing agent evenly, vacuum defoam, then spin coat on the sacrificial layer, and cure to form a PDMS film;

[0027] 3. Magnetron sputtering metallic silver on the PDMS film formed in step 2 to form a silver layer;

[0028] 4. Spin-coat photoresist on the silver layer formed in step 3, then put it on the hot stage and bake before forming the photoresist layer;

[0029] 5. Use a photolithography machine to expose, transfer the required pattern to the photoresist layer formed in step 4 through the mask plate, put it on the hot table and bake it, and then develop it in the developer solution. pattern is required, and the rest of the...

specific Embodiment approach 2

[0032] Embodiment 2: This embodiment differs from Embodiment 1 in that: in step 1, the base material is glass, and it is ultrasonically cleaned with acetone, alcohol, and deionized water for 10 minutes before use. Others are the same as in the first embodiment.

specific Embodiment approach 3

[0033] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: in step 1, when the photoresist is spin-coated, the control speed is 4000 r / min, and the time is 50 s. Others are the same as in the first or second embodiment.

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Abstract

The invention discloses a preparation method of a stretchable elastic cross-shaped metamaterial, and relates to the field of preparation of metamaterials. The invention aims to solve the technical problems that an existing terahertz switching device is complex in structure, cannot be curled and stretched and is single in working frequency band. The preparation method comprises the following stepsof: spin-coating a sacrificial layer on a substrate, and carrying out magnetron sputtering of metal silver to form a silver layer; and spin-coating photoresist, carrying out exposure by adopting a photoetching machine, transferring a required pattern to the photoresist layer formed in the step 4 through using a mask plate, exposing the silver layer by adopting ferric nitrate solution corrosion, spin-coating a PDMS mixed solution, and dissolving the sacrificial layer by adopting a dissolving solution. According to the preparation method, the cross-shaped metal metamaterial is prepared through adopting a PDMS film forming process and a traditional photoetching technology, and the macroscopic size of a sample is changed by acting external stress on a PDMS substrate, so that the period of themetamaterial is changed microcosmically; and the resonance frequency of an electric dipole and the resonance frequency of a surface Bloch mode are subjected to red shift along with the increase of theperiod, so that the transmission intensity at the resonance frequency position is increased. The preparation method is used for preparing the stretchable elastic cross-shaped metamaterial.

Description

technical field [0001] The invention relates to the field of preparation of supermaterials. Background technique [0002] Terahertz waves are located between microwaves and infrared, and their unique spectral positions make terahertz waves have great potential in fields such as biomedicine, communication, and radar. In recent years, with the continuous upgrading of communication technology, the communication frequency band has gradually moved from microwave to millimeter wave, and the terahertz band has become the preemptive point of next-generation communication technology. As the core device of terahertz wave communication technology, terahertz switch plays an important role in controlling the transmission of terahertz signals. In addition, the current device design is developing towards miniaturization, ultra-thinning, and multi-function. The multi-band terahertz flexible switch can be applied to flexible devices and stretchable systems, and the synchronous modulation of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01Q15/00
CPCH01Q15/0086
Inventor 田浩王晶谭鹏周忠祥
Owner HARBIN INST OF TECH
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