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A special vibration testing device and method for a thermal field emission electron gun

A technology for emitting electrons and vibration testing, which is applied in vibration testing, measuring devices, and testing of machine/structural components. Vibration and other problems, to achieve the effect of simple and easy method

Active Publication Date: 2021-10-08
BEIHANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The scanning electron microscope may be affected by various working vibration sources when it is working, so that the thermal field emission electron gun installed in it will also vibrate and affect the normal imaging of the microscope
The test of the vibration characteristics of the thermal field emission electron gun under working conditions can provide a basis for the formulation of the vibration suppression scheme of the scanning electron microscope, but the general test device cannot well simulate the unique installation conditions of the thermal field emission electron gun in the scanning electron microscope, and the measured There is a deviation in the vibration characteristics of the

Method used

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  • A special vibration testing device and method for a thermal field emission electron gun
  • A special vibration testing device and method for a thermal field emission electron gun
  • A special vibration testing device and method for a thermal field emission electron gun

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Embodiment Construction

[0026] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and embodiments. The described embodiment is only an embodiment of the present invention, wherein the number of laser vibrometers 1-1 is 2, the number of loading rod 2-1-1 and vibrator body 3-1 is 1 each, and the guide rail slides The number of block modules 2-1-4 is 2, the number of observation windows 2-1-8 is 4, the number of vacuum pipeline interface 2-1-10 is 1, the frame beam 2-2, the guide rail bracket 2- 3. The rack brace 2-4 and the brace seat 2-5 are assembled to form a rack, and the measurement result is expressed as the change of the displacement with the measurement time, that is, the time domain response of the displacement. Based on the embodiment of the present invention or only changing the number of laser vibrometers, the number of loading rods and exciter bodies, the number of guide rail slider modules, the numbe...

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Abstract

The invention provides a special vibration testing device for a thermal field emission electron gun, in particular to vibrating a thermal field emission electron gun to be tested and measuring the tiny vibration displacements of different parts of the electron gun relative to excitation positions, and belongs to the field of testing equipment. The device includes a laser vibrometer, an adjustment seat for a vibrometer, a vibration isolation platform, a specimen clamping assembly, a vibrator body, a fixed table, a clamping-loading mechanism, a frame beam, a guide rail bracket, a frame brace, Diagonal support, loading rod, loading platen, loading hanger, guide rail slider module, vacuum chamber cover, terminals, vacuum chamber, observation window, specimen clamping sleeve, vacuum pipe interface. The present invention also provides a special vibration test method for a thermal field emission electron gun based on the above-mentioned device, which extracts vibration information from the test results of the test piece and the test piece holding sleeve through simple data processing, and cooperates with the above-mentioned device to make The test results are closer to the actual working conditions of thermal field emission electron guns.

Description

technical field [0001] The invention provides a special vibration testing device and method for a thermal field emission electron gun, which specifically relates to making a thermal field emission electron gun to be tested vibrate and measuring the tiny vibration displacements of different parts of the electron gun relative to excitation positions, and belongs to the field of testing equipment. Background technique [0002] Thermal field emission electron guns are currently widely used to generate electron beams in high-resolution scanning electron microscopes. When the scanning electron microscope is working, it may be affected by various working vibration sources, so that the thermal field emission electron gun installed in it will also vibrate and affect the normal imaging of the microscope. The test of the vibration characteristics of the thermal field emission electron gun under working conditions can provide a basis for the formulation of the vibration suppression sche...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M7/02G01H9/00
CPCG01H9/00G01M7/025G01M7/027
Inventor 李万国杜畅孙郑义
Owner BEIHANG UNIV
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