Device and method for testing and calibrating AC dynamic parameters of mosfet devices

Abstract

The invention provides a MOSFET device AC dynamic parameter testing and calibration device and method, belonging to the technical field of MOSFET device testing and calibration. The device includes a sorting machine with test claws and guide rails, a tester that can be electrically connected to the sorting machine through a test line, software matched with the tester, an open-circuit calibration tube, a short-circuit calibration unit and a standard calibration unit. The method includes: S1, short-circuit calibration; S2, open-circuit calibration and obtaining the first calibration data; S3, judging whether the first calibration data is qualified, if qualified, then save the first calibration data and enter step S4; S4, use and test The supporting software of the instrument performs standard calibration on the standard calibration tube to obtain the second calibration data; S5, judge whether the second calibration data is qualified, if qualified, save and burn the second calibration data. The beneficial effects of the invention include: the line resistance of the test line and the test claw can be eliminated during the calibration test, and more accurate calibration data can be obtained.

Description

technical field [0001] The invention relates to a test method in the processing process of a semiconductor device, in particular to a device and method for testing and calibrating an AC dynamic parameter of a MOSFET device. Background technique [0002] High-speed switching performance measurements of MOSFET devices (Metal Oxide Semiconductor Field Effect Transistor devices, also known as MosFet devices) are very sensitive to the effects of stray elements such as capacitance, inductance, and resistance on the test circuit. At present, the AC signal is generally output by the tester to the device under test, and then the device under test is sampled, and the Rg, Ciss, Coss, Crss and other resistance and capacitance parameters of the device under test are calculated according to the sampled value, and then calculated according to Rg. The equivalent series resistance (ESR) of the MOSFET to ensure the high-speed switching consistency of the MosFet device. Calibration and zero a...

AI Technical Summary

Problems solved by technology

The current calibration method can only use the manual test of the hand test stand, but cannot use the automatic test of the tester and sorting machine

This is because the sorting machine is mainly used for testing and sorting of MOSFET devices. The current calibration device cannot be placed on the sorting machine for testing, and the manual test stand is used for testing and calibration. Due to the peripheral parasitic resistance and parasitic capacitance, the calibration accuracy will be relatively low. Low is not conducive to subsequent sorting work

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