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Device and method for testing and calibrating alternating current dynamic parameters of MOSFET device

A dynamic parameter and calibration device technology, applied in the direction of single semiconductor device testing, measuring devices, instruments, etc., can solve the problems of automatic testing, low calibration accuracy, unfavorable sorting work, inability to use testers and sorting machines, etc. The effect of accurate and stable dynamic parameters, accurate calibration data

Active Publication Date: 2020-12-18
SICHUAN LIPTAI ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current calibration method can only use the manual test of the hand test stand, but cannot use the automatic test of the tester and sorting machine
This is because the sorting machine is mainly used for testing and sorting of MOSFET devices. The current calibration device cannot be placed on the sorting machine for testing, and the manual test stand is used for testing and calibration. Due to the peripheral parasitic resistance and parasitic capacitance, the calibration accuracy will be relatively low. Low is not conducive to subsequent sorting work

Method used

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  • Device and method for testing and calibrating alternating current dynamic parameters of MOSFET device
  • Device and method for testing and calibrating alternating current dynamic parameters of MOSFET device
  • Device and method for testing and calibrating alternating current dynamic parameters of MOSFET device

Examples

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Embodiment 1

[0013] In an exemplary embodiment of the present invention, the MOSFET device AC dynamic parameter testing and calibration device includes a sorting machine with test claws and guide rails, a tester (such as a T342 test station) that can be electrically connected to the sorting machine through a test line, and Software supplied with the tester (such as T324A installation), open calibration tubes, short calibration units, and standard calibration units.

[0014] The test claw has a first electrical connection point, a second electrical connection point, a third electrical connection point, a fourth electrical connection point, a fifth electrical connection point, and a sixth electrical connection point.

[0015] The short calibration unit includes a first short calibration tube, a second short calibration tube and a third short calibration tube, for example figure 1 shown. The standard calibration unit has at least 10 standard calibration tubes.

[0016] Each standard calibra...

Embodiment 2

[0029] In this exemplary embodiment, the method for testing and calibrating an AC dynamic parameter of a MOSFET device is implemented by the above-mentioned apparatus for testing and calibrating an AC dynamic parameter of a MOSFET device.

[0030] Specifically, the method for testing and calibrating the AC dynamic parameters of the MOSFET device may include the following steps S1-S5.

[0031] S1. Put the first short-circuit calibration tube, the second short-circuit calibration tube and the third short-circuit calibration tube into the guide rail of the sorter in sequence and connect them to the test claw of the sorter, and use the software matched with the tester to perform short-circuit calibration.

[0032] The first electrical connection point and the second electrical connection point of the test claw are connected to the first grid of the first short circuit calibration tube, and the third electrical connection point and the fourth electrical connection point of the test ...

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Abstract

The invention provides a device and a method for testing and calibrating alternating current dynamic parameters of a metal oxide semiconductor field effect transistor (MOSFET) device, and belongs to the technical field of MOSFET device testing and calibration. The device comprises a sorting machine, a tester, software, an open circuit calibration tube, a short circuit calibration unit and a standard calibration unit, wherein the sorting machine is provided with a test claw and a guide rail; the tester can be electrically connected with the sorting machine through a test line; and the softwareis matched with the tester. The method comprises the following steps: S1, short circuit calibration; S2, performing open-circuit calibration and obtaining first calibration data; S3, judging whether the first calibration data is qualified or not, and if so, storing the first calibration data and entering the step S4; S4, performing standard calibration on the standard calibration tube by using software matched with the tester to obtain second calibration data; and S5, judging whether the second calibration data is qualified or not, and storing and programming the second calibration data if thesecond calibration data is qualified. The method has the beneficial effects that the line resistance of the test line and the test claw during the calibration test can be eliminated, and more accurate calibration data can be obtained.

Description

technical field [0001] The invention relates to a test method in the processing process of a semiconductor device, in particular to a device and method for testing and calibrating an AC dynamic parameter of a MOSFET device. Background technique [0002] High-speed switching performance measurements of MOSFET devices (Metal Oxide Semiconductor Field Effect Transistor devices, also known as MosFet devices) are very sensitive to the effects of stray elements such as capacitance, inductance, and resistance on the test circuit. At present, the AC signal is generally output by the tester to the device under test, and then the device under test is sampled, and the Rg, Ciss, Coss, Crss and other resistance and capacitance parameters of the device under test are calculated according to the sampled value, and then calculated according to Rg. The equivalent series resistance (ESR) of the MOSFET to ensure the high-speed switching consistency of the MosFet device. Calibration and zero a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26
CPCG01R31/2601
Inventor 陈明李力李治全冷祥伟
Owner SICHUAN LIPTAI ELECTRONICS
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