Optical formation using pick-up tools
A technology of tools and optical components, applied in the field of semiconductor device manufacturing, can solve problems such as brightness limitation, and achieve the effect of reducing error sources and reducing errors
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[0016] In the following description, for purposes of explanation, specific details are set forth in order to provide a thorough understanding of certain inventive embodiments. It will be apparent, however, that various embodiments may be practiced without these specific details. The drawings and descriptions are not intended to be limiting.
[0017] Disclosed herein are techniques that can reduce errors during the fabrication of semiconductor devices such as LEDs and photodiodes. In some embodiments, the fabricated semiconductor devices are tiny inorganic LEDs called micro LEDs, with optical elements formed thereon. Example optical elements include, but are not limited to, lenses, waveguides, and / or diffraction gratings. As used herein, a micro LED may refer to an LED having an active light emitting area with a linear dimension of less than 50 μm, less than 20 μm, or less than 10 μm. For example, linear dimensions can be as small as 2 μm or 4 μm.
[0018] Semiconductor d...
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