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Fixing member for linear motor, linear motor and linear motor system

A technology of linear motors and fixing parts, applied in the field of fixing parts, can solve problems such as increased cost and oversized specifications, and achieve the effect of reducing working hours

Active Publication Date: 2021-10-29
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the motor structure in which magnets are arranged on the stator core as described above, it is necessary to cover the conveying path with magnets, which tends to increase the cost.
In addition, magnets are also used in the conveying section that does not require acceleration and deceleration, that is, in the conveying section that does not require high thrust, which becomes an excessively large specification.

Method used

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  • Fixing member for linear motor, linear motor and linear motor system
  • Fixing member for linear motor, linear motor and linear motor system
  • Fixing member for linear motor, linear motor and linear motor system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0028] figure 1 It is a figure which shows the structure of the linear motor concerning Embodiment 1 of this invention. figure 1 The shown cross section is a cross section perpendicular to the gap G formed between the movable member 3 and the fixed member 4 and parallel to the traveling direction A of the movable member 3 . The linear motor 1 has: a guide 5 extending in the advancing direction A; a slider 2 guided by the guide 5; a movable member 3 supported by the slider 2 slidably in the advancing direction A; and a fixing member 4 , which drives the movable member 3.

[0029] The movable element 3 has a movable core 31 composed of a laminated iron core formed by laminating soft magnetic materials. The movable core 31 has a plurality of teeth 312 protruding from the core base 311 toward the gap G side. In addition, the movable element 3 has a coil 33 wound around a plurality of teeth 312 . also, figure 1 The illustrated winding 33 of the movable element 3 is a concentra...

Embodiment approach 2

[0053] Image 6 It is a figure which shows the structure of the linear motor concerning Embodiment 2 of this invention. Image 6 The shown cross section is a cross section perpendicular to the gap G formed between the movable member 3 and the fixed member 4 and parallel to the traveling direction A of the movable member 3 . The second stator member 42 of the linear motor 1 according to the second embodiment differs from the second stator member 42 of the first embodiment in that permanent magnets are arranged between the magnetic flux induction parts 421 at both ends in the traveling direction. The magnet 411 is a so-called indirect type. The portion of the second stator member 42 where the permanent magnet 411 is sandwiched by the magnetic flux induction portion 421 is referred to as an indirect portion 423 . The permanent magnet 411 is provided on the second stator core 422 with its magnetization direction facing the thickness direction of the second stator member 42 .

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Embodiment approach 3

[0060] Figure 7 It is a figure which shows the structure of the linear motor concerning Embodiment 3 of this invention. Figure 7 The shown cross section is a cross section perpendicular to the gap G formed between the movable member 3 and the fixed member 4 and parallel to the traveling direction A of the movable member 3 . The second stator member 42 of the linear motor 1 according to Embodiment 3 has permanent magnets 411 disposed at both end portions in the traveling direction A, and has a magnetic flux induction portion 421 made of soft magnetic material at the central portion in the traveling direction A. A portion of the second stator member 42 where the permanent magnet 411 is arranged is referred to as a magnet installation portion 424 . The permanent magnet 411 is provided on the second stator core 422 with its magnetization direction facing the thickness direction of the second stator member 42 . In the linear motor 1 according to Embodiment 3, the permanent magn...

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PUM

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Abstract

The stationary part (4) of the linear motor (1) which becomes the conveyance path of the movable part (3) has: a first stationary part part (41) which has a permanent magnet ( 411); and the second stator part (42), which has a magnetic flux induction part (421) that is made of soft magnetic body and arranged along the moving direction of the movable part (4), the first stator part (41) and the first 2. The stationary member (42) is arranged in series along the traveling direction of the movable member (3).

Description

technical field [0001] The present invention relates to a linear motor fixture serving as a conveyance path of a movable element, a linear motor having a movable element and a stationary element, and a linear motor system. Background technique [0002] In recent years, linear motors capable of directly performing linear motion without converting rotary motion into linear motion, and capable of individually controlling a plurality of movable parts on the same transport path have been used in transport mechanisms. The application of the conveying mechanism realized by the linear motor to the conveying mechanism between processes in the manufacturing process of semiconductor devices that needs to remove dust is expanding. [0003] A linear motor is generally a mechanism in which a movable element having a magnet and a winding is driven on a fixed element. The fixture used as the transport path is constructed by placing permanent magnets on the core of the fixture by bonding. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K41/03
CPCH02K41/03H02K2213/03
Inventor 若山裕史元吉研太山口信一秋田裕之安藤和秋
Owner MITSUBISHI ELECTRIC CORP