Dual-output microelectromechanical resonator and method of manufacture and operation thereof
A technology of resonators and silicon resonators, applied in the field of dual-output MEMS resonators, operating and manufacturing the dual-output MEMS resonators, to achieve stable frequency, accurate time counting, and accurate temperature measurement results
Pending Publication Date: 2021-02-09
斯塔特拉IP控股公司
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Problems solved by technology
This slope is commonly referred to as the temperature coefficient of frequency (TCF) and remains one of the biggest challenges in commercializing silicon resonators to date.
Method used
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Embodiment Construction
[0117] figure 1 One embodiment of a method 10 for determining the temperature of a MEMS resonator is shown. The MEMS resonator may be a silicon resonator such as a bulk mode silicon resonator.
[0118] At step 12, the MEMS resonator is operated in an in-plane vibration mode using a first tank circuit or oscillator electrically connected to the MEMS resonator. A first electrical signal having a first frequency is then generated by the MEMS resonator.
[0119] In one embodiment, the in-plane vibration mode is the Lame vibration mode of the MEMS resonator. In another embodiment, the in-plane vibration mode is a plane shear vibration mode of the MEMS resonator, and the plane shear vibration mode is also called a wine-glass (Wine-Glass) vibration mode.
[0120] At step 14, the MEMS resonator is operated in an out-of-plane vibration mode using a second tank circuit or oscillator electrically connected to the MEMS resonator. A second electrical signal having a second frequency di...
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Abstract
There is provided a dual-output microelectromechanical system (MEMS) resonator. The MEMS resonator can be operated selectively and concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration to obtain respectively a first electrical signal having a first frequency, and a second electrical signal having a second frequency being less than the first frequency. The first and second electrical signals are mixed to obtain a third electrical signal having a third frequency, where the third frequency is proportional to a temperature of the MEMS resonator. The temperature is determined based on the third frequency. Values of the first and second frequencies can be adjusted based on the determined temperature to compensate for frequency deviations due to temperature deviations. There is also provided methods and systems for determining the temperature of the dual-output MEMS, for compensating the frequency, and a method of manufacturing the dual-output MEMS.
Description
technical field [0001] This technology relates to the field of resonator devices, and more particularly to dual output microelectromechanical system (MEMS) resonant devices that can operate in both in-plane and out-of-plane modes of vibration device, and methods of operating and fabricating the dual output MEMS resonator. Background technique [0002] Quartz crystal oscillators have been the foundation of timing and frequency reference applications for the past century. However, advances in electronics and the recent paradigm shift to modern handheld devices have highlighted the limitations of this technology. The quartz fabrication process imposes physical limits in terms of performance, power consumption, robustness, size and Complementary Metal Oxide Semiconductor (CMOS) compatibility. To meet modern requirements, researchers have been working on alternative frequency references at an alarming rate since the early 2000s. [0003] During this period, microelectromechani...
Claims
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IPC IPC(8): G01K7/00B06B1/02B81B7/02H03L1/02
CPCG01K7/00H03H2009/2442H03H9/02448B81B7/0087B81B2201/0271G01K7/32H03L1/027H03L7/16H03L7/22H03H2009/241H03H2009/02496H03H2009/02527H03H2250/00B81B3/0021
Inventor 乔治·艾瑞阿斯瓦希德·塔亚瑞艾哈迈德·霍希德查尔斯·艾伦
Owner 斯塔特拉IP控股公司