Multi-cavity piezoelectric air-liquid pump

Abstract

The invention provides a multi-cavity piezoelectric air-liquid pump. The air-liquid pump comprises a piezoelectric air pump body and a piezoelectric liquid pump body, and a piezoelectric air pump baseis in threaded connection with the piezoelectric liquid pump body; and the piezoelectric air pump body comprises a threaded pump cover I, a sealing ring I, three piezoelectric vibrators I and a pumpbody I, the three piezoelectric vibrators I and the pump body I form a pump cavity and divide the pump cavity into a first pump cavity body, a second pump cavity body and a third pump cavity body, follow-up thin wafer valves are arranged in corresponding inlets and outlets of the first pump cavity body and the second pump cavity body, a first fixing frame is arranged at the bottom of the pump bodyI, and a first V-shaped bluff body is arranged on the first fixing frame. According to the air-liquid pump, the follow-up thin wafer valves are quick in response, small in opening pressure and good in pump valve following performance, and in cooperation with the disc-shaped vibrators, the pumping performance of the parallel pump is greatly improved; and a valve pump, a valveless pump, the air pump body and the liquid pump body are integrated into a whole, all the pumps can be jointly controlled or independently controlled, simultaneous pumping and independent pumping of gas and liquid can berealized, the flow range is wide, and various working requirements can be met.

Description

technical field [0001] The invention belongs to the technical field of fluid machinery, and in particular relates to a multi-chamber pressure electro-hydraulic pump. [0002] technical background [0003] Piezoelectric pump is a new type of micropump that integrates driving parts, working parts and control parts and is easy to integrate. It uses the inverse piezoelectric effect of piezoelectric components to convert electrical energy into mechanical energy, and then transmits it to the fluid through a specific structure to form fluid pump. Compared with traditional pumps, piezoelectric pumps have significant advantages such as simple structure, miniaturization and integration, no noise, no electromagnetic interference, and can control the output of small flow according to the applied voltage or frequency. Therefore, in chemical analysis, MEMS devices And its heat dissipation, fuel supply and other fields have broad application prospects. At present, piezoelectric electric p...

AI Technical Summary

Problems solved by technology

At present, piezoelectric electric pumps and piezoelectric hydraulic pumps are mostly independent of each other, valve pumps and valveless pumps are also independent of each other. , Piezoelectric pumps and piezoelectric hydraulic pumps with independent structures, valveless pumps and valved pumps cannot meet the requirements of use

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