A kind of high temperature pressure sensor and preparation method thereof

Abstract

The invention relates to the technical field of high-temperature pressure sensors, and discloses a high-temperature pressure sensor and a preparation method thereof, comprising: a sensor head connected to each other and a conversion circuit board, and the sensor head includes: a packaging shell, a sensitive microstructure, and an air In the cavity; the front snap ring is set at the front end of the cavity to limit the front end of the sensitive microstructure; the rear snap ring is set at the back end of the cavity to limit the rear end of the sensitive microstructure; the conversion circuit The board is arranged in the sleeve shell; the high-temperature wire tube shell is connected to the package shell at one end through the connection part, and the other end is connected to the sleeve shell; the high-temperature wire passes through the high-temperature wire tube shell, and one end extends into the package shell to communicate with the sensitive Structural connection, the other end extends into the sleeve shell and connects with the conversion circuit board. This high-temperature pressure sensor and its preparation method realize the high-precision dynamic measurement of the pressure sensor in the entire temperature range of -40°C-1000°C.

Description

technical field [0001] The invention relates to the technical field of high-temperature pressure sensors, in particular to a high-temperature pressure sensor and a preparation method thereof. Background technique [0002] The high-temperature pressure sensor is to measure the pressure of various gases and liquids in a high-temperature environment, and has broad application prospects in the fields of civil industry and national defense and military industry. For example, it can be used for pressure measurement in smelting towers and high-temperature oil wells for civil use; it can be used for pressure measurement of heat-resistant cavities and surface parts such as aero-engines in military use. The measurement of pressure parameters under high temperature conditions is the key technical "bottleneck" that restricts the development and operation of large-scale equipment such as advanced engines in the aviation and aerospace fields. How to realize accurate in-situ pressure measu...

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Problems solved by technology

[0004] The invention provides a high-temperature pressure sensor and a preparation method thereof. In order to overcome the defects of the above-mentioned various types of sensors, such as large temperature drift, poor dynamic performance, and difficulty in working in a high-temperature environment for a long time, ensure that the sensor can accurately measure pressure in situ under a high-temperature environment. The present invention adopts temperature-pressure integrated sensitive microstructure, unique high-temperature signal transmission mode, packaging structure and temperature compensation system to realize high-precision dynamic measurement of pressure sensor in the whole temperature range of -40°C-1000°C

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