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Optical axis adjustment jig and optical axis confirmation method of laser processing apparatus

A technology of laser processing and optical axis, which is applied in metal processing, auxiliary devices, laser welding equipment, etc., and can solve problems such as datum blur

Pending Publication Date: 2021-03-05
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this method, since the judgment is made by visual measurement, there is a problem that the reference is blurred

Method used

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  • Optical axis adjustment jig and optical axis confirmation method of laser processing apparatus
  • Optical axis adjustment jig and optical axis confirmation method of laser processing apparatus
  • Optical axis adjustment jig and optical axis confirmation method of laser processing apparatus

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Embodiment Construction

[0027] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the constituent elements described below include substantially the same constituent elements that can be easily conceived by those skilled in the art. Moreover, the structures described below can be combined suitably. In addition, various omissions, substitutions, or changes in the structure can be made without departing from the spirit of the present invention.

[0028] [implementation mode]

[0029] The optical axis adjustment jig and the optical axis confirmation method of the laser processing apparatus according to the embodiment of the present invention will be described with reference to the drawings. figure 1 It is a perspective view which shows the structural example of the laser processing apparatus which performs the optical axis confirmation me...

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Abstract

The invention provides an optical axis adjustment jig and an optical axis confirmation method of a laser processing apparatus, which can quantitatively determine whether the optical axis of a laser beam is perpendicular to a processed object. The optical axis adjustment jig includes: a parallel flat plate (42) having reflective films formed on an upper surface (421) and a lower surface (422) thereof; and an imaging unit (43) that is disposed below the parallel flat plate (42) and capable of imaging the laser beam, the parallel flat plate (42) comprising a material that is permeable to the wavelength of the laser beam, and the laser beam being incident on the imaging unit (43) via the parallel flat plate (42). The inclination of the optical axis of the laser beam is detected on the basis ofthe beam shape of the laser beam imaged by the imaging unit (43).

Description

technical field [0001] The invention relates to an optical axis adjustment jig and a method for confirming the optical axis of a laser processing device. Background technique [0002] In a laser processing device that uses a laser beam to process a workpiece, it is configured to use a plurality of optical elements to propagate the laser beam emitted from the laser oscillator to the processing point, and use a condensing lens to condense the beam to the workpiece. Processing is performed (for example, refer to Patent Document 1 and Patent Document 2). [0003] Patent Document 1: Japanese Patent Laid-Open No. 2010-099667 [0004] Patent Document 2: Japanese Patent Laid-Open No. 2011-25279 [0005] Here, in the conventional laser processing apparatuses shown in Patent Document 1 and Patent Document 2, etc., when the laser beam enters obliquely with respect to the workpiece, the workpiece may be processed obliquely or the formed Machining defects such as differences in machin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/064B23K26/046B23K26/70
CPCB23K26/0643B23K26/046B23K26/702B23K26/032B23K26/035B23K26/0861B23K26/705B23K37/0408B23K37/0452H01L21/67092B23K37/0443B23K2101/40B23K26/0853B23K26/082
Inventor 能丸圭司
Owner DISCO CORP