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Shape measuring device, reference device, and calibration method for detector

A technology for measuring devices and detectors, which is applied to measuring devices, grinding devices, optical devices, etc., and can solve problems such as the decline in measurement accuracy of the upper surface of workpieces

Active Publication Date: 2021-03-05
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If high-precision zero point calibration is not performed, the measurement accuracy of the straightness of the upper surface of the workpiece will decrease

Method used

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  • Shape measuring device, reference device, and calibration method for detector
  • Shape measuring device, reference device, and calibration method for detector
  • Shape measuring device, reference device, and calibration method for detector

Examples

Experimental program
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Embodiment Construction

[0046] Below, refer to Figure 1 to Figure 11 , the shape measuring device of the embodiment will be described.

[0047] figure 1Middle (A) is a perspective view of a grinding device incorporating the shape measuring device of this embodiment. The grinding device includes: a movable table 10 , a table guiding mechanism 11 , a grinding wheel head 15 , a grinding wheel 16 , a guide rail 18 , a control device 20 , an input and output device 21 , a benchmark 30 and a detector 40 . The movable table 10 can reciprocate in one direction in the horizontal plane by being driven by the table guide mechanism 11 . An object to be ground (that is, a workpiece 12 ) is supported on the movable table 10 . The workpiece 12 corresponds to a measuring object whose straightness is measured by a shape measuring device.

[0048] Grinding wheel head 15 is supported above workpiece 12 on movable table 10 by guide rail 18 so as to be supported up and down. The grindstone head 15 can move in a dir...

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PUM

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Abstract

The invention provides a shape measuring device which is not easy to generate deviation of a zero point position in zero point calibration of a detector. The detector includes at least three displacement meters arranged in a row, and is disposed to face the object to be measured so as to detect displacement of a distance from the at least three displacement meters to the object to be measured. Thereference device is supported by the support member so as to provide a reference surface for calibration of the detector. And the control device is used for calibrating the detector. The reference device has a support structure supported by the support member at two locations in the arrangement direction of the at least three displacement meters. The control device performs calibration of the detector in a state in which the reference surface is placed on the at least three displacement meters.

Description

[0001] This application claims priority based on Japanese Patent Application No. 2019-158610 filed on August 30, 2019. The entire content of this Japanese application is incorporated in this specification by reference. technical field [0002] The present invention relates to a shape measuring device, a method of calibrating a tester mounted on the shape measuring device, and a standard used in the calibration of the tester. Background technique [0003] As a method of measuring the straightness of the upper surface of an object to be ground (i.e., a workpiece), there is known an on-machine measurement method that uses the workpiece feed function of a grinding device to scan the machined surface by attaching a displacement gauge to the grinding wheel head . A sequential three-point method using a detector including three displacement gauges is generally used in the machine measurement method (for example, Patent Document 1). In the successive three-point method, the positi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20G01B21/24G01B21/04
CPCG01B21/20G01B21/24G01B21/042G01B11/245G01B11/306G01B9/02049G01B9/02061G01B11/026B24B37/04
Inventor 高娜市原浩一
Owner SUMITOMO HEAVY IND LTD
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