Calibration method of shape measuring device, reference device and detector
A technology for measuring devices and detectors, which is applied to measuring devices, grinding devices, optical devices, etc., and can solve problems such as the decline in measurement accuracy of the upper surface of workpieces
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[0046] Below, refer to Figure 1 to Figure 11 , the shape measuring apparatus of the embodiment will be described.
[0047] figure 1Center (A) is a perspective view of a grinding device in which the shape measuring device of the present embodiment is incorporated. The grinding device includes: a movable table 10 , a table guide mechanism 11 , a grinding wheel head 15 , a grinding wheel 16 , a guide rail 18 , a control device 20 , an input and output device 21 , a reference device 30 and a detector 40 . The movable table 10 can reciprocate in one direction in the horizontal plane by the drive of the table guide mechanism 11 . The object to be ground (ie, the workpiece 12 ) is supported on the movable table 10 . The workpiece 12 corresponds to a measurement object whose straightness is measured by a shape measuring device.
[0048] The grinding wheel head 15 is supported by the guide rail 18 above the workpiece 12 on the movable table 10 so as to be able to move up and down....
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