Niobium-based planar multi-superconducting quantum bit and preparation method and application thereof
A superconducting quantum and planar technology, applied in the field of superconducting quantum, can solve problems such as failure of superconducting qubit processing, damage conditions of process implementers, and success rate of three-dimensional packaging process affecting superconducting qubit performance.
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[0065] This embodiment is used to illustrate the preparation method of niobium-based planar multi-superconducting qubits of the present invention.
[0066] (1) Pre-cleaning of the substrate to ensure high-quality and pure metal niobium film growth in subsequent steps
[0067] Step 1: After placing the standard 2-inch sapphire substrate in analytical pure acetone liquid, clean it with 40W ultrasonic wave for 10 minutes.
[0068] Step 2: After step 1, use clean tweezers to take out the standard 2-inch sapphire substrate in the acetone liquid and quickly (the acetone liquid on the substrate should completely cover the substrate during this process) put it into the analytical pure isopropanol liquid, Afterwards, clean with a power of 40W ultrasonic wave for 10 minutes.
[0069] Step 3: After step 2, use clean tweezers to clamp the standard 2-inch sapphire substrate in the isopropanol liquid and quickly put it into the deionized water liquid (the isopropanol liquid on the substrat...
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