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Method for measuring micro-displacement of load platform with multi-dimensional force sensor and installation method for measuring sensitive components

A technology of multi-dimensional force sensor and measurement method, applied in the field of sensor measurement, can solve problems such as installation of measurement sensitive components, and achieve the effect of improving structural rigidity and measurement accuracy

Active Publication Date: 2022-01-28
马洪文 +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The invention aims to solve the problem of high-precision measurement of the micro-displacement of the load platform in the measurement process of the six-dimensional force sensor and the installation of the measurement sensitive element for realizing the high-precision measurement of the micro-displacement

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  • Method for measuring micro-displacement of load platform with multi-dimensional force sensor and installation method for measuring sensitive components
  • Method for measuring micro-displacement of load platform with multi-dimensional force sensor and installation method for measuring sensitive components
  • Method for measuring micro-displacement of load platform with multi-dimensional force sensor and installation method for measuring sensitive components

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specific Embodiment approach 1

[0068] Before describing this embodiment, first explain the basis of this embodiment:

[0069] First, the representation form of the space vector symbol of the present invention is described, for example The whole of each parameter is specified as a form:

[0070] The main body of the symbol represents a space vector, Q represents a generalized force including force and moment, F represents a force, and M represents a moment; Δ represents a generalized deformation displacement of deformation including linear displacement and rotational angular displacement, ΔD represents linear deformation displacement, and Δθ represents rotational angular deformation Displacement; r represents the distance between the origin of the local coordinate system in the global coordinate system and the origin of the global coordinate system, and β represents the rotation angle of the local coordinate system around the three axes of the global coordinate system;

[0071] The superscript in the upper...

specific Embodiment approach 2

[0131] Through the process of the first embodiment, it can be seen that as long as the micro-displacement of the load platform of the multi-dimensional force sensor is obtained, the multi-dimensional force can be obtained.

[0132] This embodiment is a method for measuring the micro-displacement of a load platform of a multi-dimensional force sensor, including the following steps:

[0133] In the solution process of specific implementation mode 1, a very important step is to specifically solve the deformation displacement of the load platform in the global coordinate system And solving this deformation displacement depends on the micro-displacement sensor installed on the six-dimensional force sensor, and / or, the strain gauge installed on the strain beam, and / or, adopts piezoelectric crystal as the strain beam; Micro-displacement sensor, strain gauge or Piezoelectric crystal strain beams are collectively referred to as measurement sensitive elements;

[0134] solve The fir...

specific Embodiment approach 3

[0186] This implementation mode is the installation method of the measurement sensitive element of the multi-dimensional force sensor, which refers to the installation method in which the observable quantity along / around the sensitive axis in the local coordinate system can be obtained through the decoupling installation method of the measurement sensitive element, and the obtained observable quantity is, namely The variables on the right side of the coordination relationship equations;

[0187] The installation method of the measurement sensitive element is that the measurement axis of the measurement sensitive element coincides with the coordinate axis of the local coordinate system, and the measured quantity is the observable quantity; the described measurement sensitive element is only sensitive to one or several axes along / around , but not sensitive to along / around other axes, and when there are several sensitive axes, there is a decoupling relationship between different s...

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Abstract

The invention relates to a method for measuring micro-displacement of a load platform of a multi-dimensional force sensor and an installation method for measuring sensitive components, belonging to the technical field of sensor measurement. In order to solve the problem of high-precision measurement of the micro-displacement of the load platform during the measurement process of the six-dimensional force sensor. The load platform micro-displacement measurement method of the present invention establishes the vector transformation relationship matrix between the local coordinate system and the global coordinate system according to the space vector transformation rule; adopts the space vector transformation to establish the local micro-displacement and / or strain beam of each micro-displacement sensor The coordination relationship equations of the local micro-displacement of the load platform and the global micro-displacement of the load platform; extract the equations on the right side that can actually obtain the observable quantity from the coordination relationship equations, establish the solution equations for the micro-displacement of the load platform, and solve the equations to obtain the load platform Micro-displacement, in addition, the observable stiffness matrix can be established by solving the equation group through the micro-displacement of the load platform; it is mainly used for the micro-displacement measurement of the load platform.

Description

technical field [0001] The invention belongs to the technical field of sensor measurement, and relates to a micro-displacement measurement method of a load platform of a multi-dimensional force sensor and an installation method of a measurement sensitive element. Background technique [0002] The multi-dimensional force sensor can detect the information of force acting in space, among which a typical six-dimensional force sensor can obtain 3 component forces and 3 moments formed by the force in the space coordinate system. In the fields of aerospace and robotics, the six-dimensional force sensor plays an important role, and the accuracy of the obtained six-dimensional force directly affects the work and control accuracy of the system. [0003] From the analysis of the structure of the six-dimensional force sensor, the six-dimensional force sensor can be mainly divided into integral elastic structure, Stewart parallel structure, piezoelectric crystal type, frictionless guide ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L5/16G01L5/167G01L5/165G01L5/164
CPCG01L5/16G01L5/167G01L5/165G01L5/164
Inventor 马洪文邢宇卓
Owner 马洪文