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Bi-directional breakdown silicon controlled rectifiers

A silicidation and silicide technology, applied in semiconductor devices, electric solid state devices, electrical components, etc., can solve the problems of inconsistent trigger voltage, occupying a large area that cannot be provided, etc.

Pending Publication Date: 2021-04-06
格芯美国公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem with this conventional solution is that it takes up a large area which may not be available
Also, these conventional devices do not provide symmetrical protection for the (+ / -) voltage window
This is because conventional devices have p-type (P+) wells isolated from each other, resulting in inconsistent trigger voltages due to the isolated P+ wells being at different potentials

Method used

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  • Bi-directional breakdown silicon controlled rectifiers
  • Bi-directional breakdown silicon controlled rectifiers
  • Bi-directional breakdown silicon controlled rectifiers

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Embodiment Construction

[0015] The present disclosure relates to semiconductor structures, and more particularly to bidirectional breakdown silicon-controlled rectifiers (SCRs) and methods of fabrication. In embodiments, the present disclosure provides bi-directional breakdown SCRs implemented in fifth generation (5G) networks as well as other networks and circuits. Advantageously, the structures and methods described herein improve electrostatic discharge (ESD) protection of switches implemented within 5G networks while minimizing the area required for implementation. In this way, bidirectional breakdown SCRs can provide symmetrical protection of positive and negative (+ / -) voltage windows with the smallest required area, saving up to 40% area.

[0016] The structure of the present disclosure includes a plurality of p-type (P+) and n-type (N+) regions and a plurality of P+ wells and N+ wells to form a bidirectional breakdown SCR. In an embodiment, multiple P+ wells are connected to each other, whil...

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PUM

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Abstract

The present disclosure relates to semiconductor structures and, more particularly, to bi-directional silicon controlled rectifiers (SCRs) and methods of manufacture. The structure includes: a plurality of diffusion regions; a plurality of p-type (P+) wells adjacent to the diffusion regions, wherein the P+ wells are directly connected; and a plurality of n-type (N+) wells adjacent to the P+ wells.

Description

technical field [0001] The present disclosure relates to semiconductor structures, and more particularly to bidirectional breakdown silicon-controlled rectifiers (SCRs) and methods of fabrication. Background technique [0002] As semiconductor devices continue to be scaled down (eg, shrunk), the desired spacing (ie, pitch) between features is also getting smaller. To this end, at smaller technology nodes, devices become more susceptible to external stresses. As such, it becomes increasingly difficult to fabricate devices with specific features that warrant robust chips due to critical dimension (CD) scaling and processing capabilities, as well as the materials used to fabricate such structures. [0003] Fifth generation (5G) network technology implements switches used to switch between positive and negative (+ / -) voltages within the network. External stressors such as electrostatic discharge (ESD) can cause problems with switches. Therefore, these switches require protect...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02
CPCH01L27/0207H01L27/0262H01L29/861H01L29/0692H01L29/0649H01L29/747H01L29/66386
Inventor S·米特拉A·F·卢瓦索R·J·戈希尔李由蔡东辰
Owner 格芯美国公司
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