Measuring method and measuring device for polarization element
A polarization element and measurement method technology, which is applied in the field of optical measurement, can solve the problem that the calibration accuracy has a great influence on the test results, and achieve the effect of improving the measurement accuracy.
Active Publication Date: 2021-05-04
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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[0003] The characteristics of the polarizing element are usually measured using an ellipsometer, but the calibration accuracy of the ellipsometer itself will have a great impact on the test results
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[0062] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.
[0063] figure 1 A flow chart of a measurement method for a polarizing element is provided for an embodiment of the present invention, refer to figure 1 , the measuring method of the polarizing element provided by the embodiment of the present invention comprises the following steps:
[0064] Step S110, obtaining the air light intensity matrix I when no polarizing element is placed air .
[0065] In each embodiment of the present invention, the polarizing element includes not only polarizers and other elements t...
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The invention provides a measuring method and a measuring device for a polarization element. The measuring method comprises the steps of: acquiring an air light intensity matrix Iair when the polarization element is not placed; acquiring a sample light intensity matrix Ii penetrating through the polarization element after the polarization element is placed, wherein the sample light intensity matrix Ii is a function of a matrix Mi, and the matrix Mi is a matrix, which does not contain a rotation part, in a matrix in which the polarization characteristics of the polarization element are represented by a Mueller matrix; according to the air light intensity matrix Iair and the sample light intensity matrix Ii, acquiring a transfer incidence matrix Ci and a relation between an eigenvalue of the transfer incidence matrix Ci and an eigenvalue of the matrix Mi; and according to the transfer incidence matrix Ci and the relation between the eigenvalue of the transfer incidence matrix Ci and the eigenvalue of the matrix Mi, acquiring the transmittance and the phase delay of the polarization element. The provided measuring method and measuring device for the polarization element can realize the effects that the polarization element does not need to be calibrated in advance when being measured and the measuring precision can be improved.
Description
technical field [0001] The invention relates to optical measurement technology, in particular to a measurement method and a measurement device of a polarization element. Background technique [0002] Large-scale ultra-high numerical aperture imaging systems such as lithography machines have extremely high requirements for various optical components. In polarization-related experiments, it is necessary to accurately know the characteristics of the polarization components, such as: the extinction ratio of the polarizer and the phase delay of the wave plate. Wait. The extinction ratio of the polarizer is the ratio of the transmittance of the bright axis and the dark axis, and the phase retardation of the wave plate is the relative phase between the fast axis and the slow axis. [0003] The characteristics of the polarizing element are usually measured by using an ellipsometer, but the calibration accuracy of the ellipsometer itself has a great influence on the test results. ...
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IPC IPC(8): G01M11/02
CPCG01M11/02
Inventor 郁毅敏王健
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD