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Film thickness measuring device and film thickness measuring method

A technology for measuring devices and film thickness, applied in measuring devices, optical devices, instruments, etc., can solve the problems of incomplete measurement results, low measurement efficiency, incompleteness, etc.

Pending Publication Date: 2021-05-11
冯宗宝
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The technical defect of this application method is that it can only get one-sided thickness distribution in the longitudinal direction of the coating, the measurement efficiency is low, and it is not comprehensive.
The technical defect of this application method is: only the thickness distribution at the position where the coating sample presents an "S" shape can be obtained
The measurement results are not very comprehensive and have certain limitations

Method used

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  • Film thickness measuring device and film thickness measuring method
  • Film thickness measuring device and film thickness measuring method
  • Film thickness measuring device and film thickness measuring method

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Embodiment Construction

[0044] In order to facilitate the understanding of the present invention, the present invention will be described more fully and in detail below in conjunction with the accompanying drawings and preferred embodiments, but the protection scope of the present invention is not limited to the following specific embodiments. It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0045] In order to realize the purpose of the present invention, the technical scheme provided by the present invention is:

[0046] On the one hand, in some embodiments of the present invention, such as figure 1 , shown in 2, discloses a kind of film thickness measurement device, comprises: carrying platform 1, fixing device 2, measuring unit 3, communication wire 4 and post-processing unit 5; The sample piece 01 to be tested provides an operating space for measuring the thickness of the sample pi...

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Abstract

The invention discloses a film thickness measuring device which comprises a bearing platform, a fixing device, a measuring unit, a communication wire and a post-processing unit. The bearing platform is used for bearing a film thickness to-be-measured sample; the fixing device is provided with a plurality of measuring holes which are distributed in an array mode; the measuring unit comprises a measuring probe; and the post-processing unit is used for analyzing and processing the signal from the measuring unit and outputting a measuring result. According to the invention, the measuring probes are introduced into the measuring unit and are distributed in an array mode, multi-point thickness measurement is carried out on the to-be-measured film thickness sample at one time, and measurement data of each point are integrated, so that thickness characterization of a large-area film coating film layer is accurately and efficiently completed; and film thickness measurement can be carried out on a film layer with special requirements in a special environment.

Description

technical field [0001] The invention relates to the technical field of film thickness detection, in particular to a film thickness measuring device and a film thickness measuring method. Background technique [0002] Coating methods are widely used in electronics, tapes, optical films, semiconductors, 5G communications and other industries, and coating film materials have also been expanded from the original adhesive materials to current optoelectronic materials, protective materials, sensing materials, Anti-counterfeiting materials, magnetic materials and heat dissipation materials, etc. With the high-efficiency production of functional layer coating and the requirements of high-precision film thickness uniformity, the quality control of coated products and the thickness detection of coated film layers have become extremely important process links. [0003] In the prior art, there are mainly two application methods for the online film thickness measurement equipment settin...

Claims

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Application Information

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IPC IPC(8): G01B11/06
CPCG01B11/0625
Inventor 冯宗宝
Owner 冯宗宝
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