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A kind of trimethyl phosphite rectification tail gas deodorization method and equipment

A technology of trimethyl phosphite and tail gas, which is applied in the direction of separation methods, chemical instruments and methods, and separation of dispersed particles, can solve the problems of tail gas odor, achieve the effect of reducing odor and benefiting environmental protection

Active Publication Date: 2022-07-19
贵州威顿晶磷电子材料股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] This application provides a method and equipment for deodorizing tail gas from the rectification of trimethyl phosphite to solve the problem of the tail gas odor produced by the rectification of trimethyl phosphite in the prior art

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  • A kind of trimethyl phosphite rectification tail gas deodorization method and equipment
  • A kind of trimethyl phosphite rectification tail gas deodorization method and equipment
  • A kind of trimethyl phosphite rectification tail gas deodorization method and equipment

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Embodiment Construction

[0024] It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

[0025] In order to make those skilled in the art better understand the solutions of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only The embodiments are part of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present application.

[0026] It shou...

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Abstract

The present application discloses a method and equipment for deodorizing trimethyl phosphite rectification tail gas. The method includes: first purifying the trimethyl phosphite tail gas generated under rectification conditions; The gas undergoes a second purification. The present application solves the problem of the stench of tail gas produced by the rectification of trimethyl phosphite in the prior art, reduces the stench in the tail gas produced by the rectification of trimethyl phosphite to a certain extent, and is beneficial to environmental protection and the physical and mental health of employees healthy.

Description

technical field [0001] The application relates to the field of waste gas treatment in chemical production, and in particular, to a method and equipment for deodorizing tail gas of trimethyl phosphite rectification. Background technique [0002] Among semiconductor deposition materials, trimethyl phosphite (TMP) is the main phosphorus source for deposition of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) during wafer fabrication. However, the preparation of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) requires the main content of TMP to be above 99.99% and the purity to be above 8.5N to meet the demand. Therefore, rectification of TMP is required in the production process. [0003] The inventor found that the process is simple to use, but because TMP is volatile, it produces a pungent bitter odor, which easily causes on-site odor, damages the health of production personnel, and is not conducive to normal production operations. Most of t...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D53/14B01D53/18B01D53/02B01D53/81
CPCB01D53/1487B01D53/1493B01D53/1431B01D53/1437B01D53/18B01D53/02B01D53/81B01D2252/20B01D2252/2021B01D2252/202B01D2252/205B01D2251/10B01D2251/106B01D2253/20B01D2253/204
Inventor 蒋飚郭之军李能武赵和英张光祥彭小敏王雲倪嘉怡
Owner 贵州威顿晶磷电子材料股份有限公司