Scribing head and scribing apparatus
A scoring head and scoring line technology, which is applied to glass cutting devices, fine working devices, glass manufacturing equipment, etc., can solve the problems of compact scoring devices, scoring line accuracy, and quality reduction.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
no. 1 approach
[0036](1) Schery
[0037]usefigure 1 It will be made to clear the scoring device 101.figure 1 It is a summary of the scrapping device. The scoring device 101 is a device that is scratched on the substrate W. The substrate W is, for example, a glass substrate, a ceramic substrate, a sapphire substrate, a silicon substrate, and the like.
[0038]The scrubber 101 includes a table 102 (an example of the substrate mounting portion) on the substrate W. The workbench 102 is contained on the mobile station 103. The mobile station 103 is driven by the ball screw 107 that is rotated by the drive motor 106 so that it can be moved along the horizontal rails 105a, 105b.
[0039]It should be noted that in the following description, the horizontal direction of the rails 105a, 105b extends is set to the Y direction, and the horizontal direction of orthogonal is set to the X direction. Further, the height direction perpendicular to the horizontal direction (X direction, Y direction) is set to the Z direction...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


