MicroLED detection equipment

A technology for testing equipment and lenses, which is applied in measuring devices, optical testing of flaws/defects, and material analysis through optical means. It can solve problems such as complex structure of camera adjustment devices, high design costs, and reduced position adjustment accuracy. The effect of simplification, simplification of structure, and improvement of position adjustment accuracy

Pending Publication Date: 2021-06-01
苏州凌云光工业智能技术有限公司
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

In order to maintain the six degrees of freedom of the camera and the lens in the case of a long lens, the structure of the ca

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[0027]The present invention is further detailed in conjunction with the accompanying drawings and examples. It will be appreciated that the specific embodiments described herein are merely illustrative of the invention and are not limited thereto. It will also be noted that in order to facilitate the description, only the parts associated with the present invention are shown in the drawings rather than all structures.

[0028]In the description of the present invention, the term "connected", "connection", "fixed", unless otherwise expressly specified and defined, and "fixed", for example, may be a fixed connection, or a detachable connection, or integral However, it can be a mechanical connection, or may be electrically connected; may be directly connected, or can be indirectly connected by an intermediate medium, which may be a communication between two elements or two components. Relationship. The specific meaning of the above terms in the present invention will be appreciated to tho...

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Abstract

The invention belongs to the technical field of MicroLED detection, and relates to MicroLED detection equipment, which comprises a camera adjusting device and a carrying platform, wherein the camera adjusting device comprises a fixing seat, a camera and a lens, the camera and the lens can move along a first direction, can rotate around the first direction, can rotate around a second direction, and can rotate around a third direction, the first direction, the second direction and the third direction are perpendicular to one another, the carrying platform comprises a bottom plate and a bearing body, the bearing body is movably installed on the bottom plate in the second direction and the third direction, the camera adjusting device can adjust the position of the lens in four degrees of freedom, and compared with an existing camera adjusting device, two degrees of freedom are reduced. According to the invention, the degree of freedom of movement in the second direction and the third direction can be borne by the carrying platform, so that the structure of the camera adjusting device can be simplified, and the simplification of the structure is beneficial to improving the position adjusting precision of the camera and the lens.

Description

technical field [0001] The invention belongs to the technical field of Micro LED detection and relates to a Micro LED detection device. Background technique [0002] Micro LED is the future development direction of the display industry. Cameras can be used to detect MicroLEDs. During the camera inspection process, the camera and the lens need to be adjusted in six degrees of freedom through the camera adjustment device, so that the lens is opposite to the MicroLED to be inspected on the stage. [0003] In order to improve the detection accuracy, a camera with a higher resolution and a lens combination can be used to detect Micro LEDs. In this combination, the length of the lens will be longer and the weight will be heavier. In order to maintain the six degrees of freedom of the camera and the lens in the case of a long lens, the structure of the camera adjustment device will be complicated, the design cost will be high, and the position adjustment accuracy will be reduced...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01N21/88
CPCG01N21/01G01N21/88G01N2021/0112
Inventor 王忠祥陆豪亮姚毅
Owner 苏州凌云光工业智能技术有限公司
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