Surface acoustic wave resonator capable of suppressing transverse modes and manufacturing method thereof
A surface acoustic wave, transverse mode technology, applied in impedance networks, electrical components, etc., can solve problems such as passband fluctuations, adverse effects on device performance, etc., to reduce the requirements of the process, solve the reduction of electrode gaps, and solve the problem of re-engraving bias. shift effect
Active Publication Date: 2022-04-26
HANGZHOU SAPPLAND MICROELECTRONICS TECH CO LTD
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However, the inventor believes that there are deficiencies in SAW-related technologies. There are strong transverse modes in the surface acoustic wave resonator, which is reflected in the performance of the device, which will cause severe fluctuations between the passbands and adversely affect the performance of the device.
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[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary embodiments do not represent all implementations consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with aspects of the present application as recited in the appended claims. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0038] T...
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The invention discloses a surface acoustic wave resonator capable of suppressing transverse modes, comprising a piezoelectric substrate and an interdigital transducer located on the surface of the piezoelectric substrate, the central area of the interdigital transducer and confluence areas on both sides At least part of the area between them is respectively covered with a first temperature compensation layer, and the interdigital transducer is on the part outside the first temperature compensation layer on both sides and between the first temperature compensation layers on both sides Covered with a second temperature compensation layer; the sound velocity of the first temperature compensation layer is lower than that of the second temperature compensation layer. The invention also discloses a manufacturing method of the surface acoustic wave resonator capable of suppressing transverse modes.
Description
technical field [0001] The invention belongs to the technical field of surface acoustic waves, and in particular relates to a surface acoustic wave resonator capable of suppressing transverse modes and a manufacturing method thereof. Background technique [0002] SAW (surface acoustic wave), also known as surface acoustic wave, is an elastic wave that is generated and propagated on the surface of a piezoelectric substrate material, and whose amplitude decreases rapidly as the depth of the substrate material increases. The basic structure of the SAW resonator is an interdigital transducer (Interdigital Transducer, IDT) made on the polished surface of the substrate material with piezoelectric properties. However, the inventor believes that there are deficiencies in SAW-related technologies. There are strong transverse modes in surface acoustic wave resonators, which will reflect on device performance and cause severe fluctuations between passbands, which will adversely affect ...
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IPC IPC(8): H03H9/17H03H9/02H03H3/02
CPCH03H9/17H03H9/02H03H3/02
Inventor 郑根林张树民
Owner HANGZHOU SAPPLAND MICROELECTRONICS TECH CO LTD