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Power output method and device, electronic equipment and storage medium

A power output and power technology, which is applied in the field of power output control, can solve the problem that the RF power supply cannot output power accurately, and achieve the effect of fast adjustment speed and high accuracy

Active Publication Date: 2021-06-18
成都沃特塞恩电子技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of this application is to provide a power output method, device, electronic equipment and storage medium to solve the problem that the radio frequency power supply in the prior art cannot quickly and accurately output the specified power

Method used

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  • Power output method and device, electronic equipment and storage medium
  • Power output method and device, electronic equipment and storage medium
  • Power output method and device, electronic equipment and storage medium

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Embodiment Construction

[0047]In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments It is a part of the embodiments of this application, not all of them. The components of the embodiments of the application generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations.

[0048] Accordingly, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art wi...

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Abstract

The invention provides a power output method and device, electronic equipment and a storage medium, and belongs to the technical field of power output control. The method comprises the following steps that: target output power is received; the capacitance value of a vacuum capacitor is adjusted from small to large according to a first step length; the output power of a power output system is obtained in real time; when the difference value between the output power and the target output power is minimum, the first capacitance value of the vacuum capacitor is determined; then the vacuum capacitor is controlled to work according to the first capacitance value; the capacitance value of the vacuum capacitor is adjusted from small to large according to the first step length; the current output power of the power output system is obtained in real time; the second capacitance value of the vacuum capacitor is determined when the difference value between the output power and the target output power is minimum; the vacuum capacitor is controlled to work according to the second capacitance value, so that the power output system outputs the target power. The power output method and device are higher in power regulation efficiency and higher in accuracy.

Description

technical field [0001] The present application relates to the technical field of power output control, and in particular, to a power output method, device, electronic equipment, and storage medium. Background technique [0002] The radio frequency power supply is a power supply that can generate a sine wave voltage with a fixed frequency, the frequency is within the radio frequency range (about 3KHz ~ 300GHz), and it has a certain power. RF power supply has been widely used in semiconductor process equipment; LED and solar photovoltaic industry; plasma generation in scientific experiments; RF induction heating; medical beauty; atmospheric pressure plasma disinfection and cleaning and other fields. [0003] In actual application, the user may specify the output power, and the existing RF power supply cannot output the specified power quickly and accurately. Contents of the invention [0004] The purpose of the present application is to provide a power output method, device...

Claims

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Application Information

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IPC IPC(8): H02M1/00H03G3/20
CPCH02M1/00H03G3/20
Inventor 何磊
Owner 成都沃特塞恩电子技术有限公司