Sampling device

Abstract

The invention provides a sampling device which comprises a box body, a box door, a sample inlet, a sampling bottle containing groove and a liquid outlet; the box door is arranged on the box body in an opening and closing mode; when the box door is closed, a closed containing space is defined by the box door and the box body; the sample inlet is positioned in a top plate of the box body and penetrates through the top plate; the sampling bottle containing groove is positioned in a bottom plate of the box body and is positioned below the sample inlet; and the liquid outlet is formed in the bottom plate of the box body, penetrates through the bottom surface of the bottom plate, and is communicated with the sampling bottle containing groove. When the sampling device disclosed by the invention is used for sampling, the box door and the box body define the closed containing space, and chemical liquid sputtered or volatilized on the box door can be discharged from the liquid outlet, so that the sampling operation is safer, and the contact between an operator and the chemical liquid and the corrosion of diffusion of the chemical liquid to other parts of the device can be reduced.

Description

technical field [0001] The invention belongs to the field of semiconductor integrated circuit manufacturing and relates to a sampling device. Background technique [0002] In the semiconductor manufacturing process, many corrosive, oxidizing or toxic chemical liquids are used. In order to ensure the stable process, sampling bottles are usually arranged in the device module, and the sampling bottles are open and placed on the corresponding support frame in the module. On the acquisition, such as containing HF, H 2 SO 4 When waiting for dangerous chemical liquid samples, problems such as chemical liquid diffusion are prone to occur. [0003] Therefore, how to provide a new sampling device to reduce sample diffusion and improve safety has become an important technical problem to be solved urgently by those skilled in the art. Contents of the invention [0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a...

AI Technical Summary

Problems solved by technology

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a sampling device for solving the problem of chemical liquid diffusion in the existing open sampling device

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