Multi-silicon-wafer transporting, taking and delivering vehicle

Abstract

The invention discloses a multi-silicon-wafer transporting, taking and delivering vehicle which has the functions of lifting and stretching besides the conventional wafer transporting function, a first lifting mechanism is designed in a bearing, taking and delivering mechanism, the first lifting mechanism can drive a tray taking and delivering mechanism and a tray to ascend and descend, meanwhile, a telescopic guide rail is designed in the bearing, taking and delivering mechanism, and the telescopic guide rail can drive the tray taking and delivering mechanism and the tray to ascend and descend. Furthermore a telescopic guide rail is designed in the bearing, taking and delivering mechanism, furthermore frontward and backward telescoping of a tray bearing plate can be realized, and a tray is driven to perform frontward and backward telescoping. The taking and sending function of the transportation taking and sending vehicle can be completed through cooperation of the telescopic function and the lifting function, manual taking and sending are replaced, the transportation taking and sending vehicle can take and send a large number of silicon wafers at a time on the basis of transportation, the silicon wafer tray taking and sending efficiency is improved, the problem that high-temperature scalding is easily caused when the silicon wafers are manually taken and conveyed in the past is effectively solved; the transporting, taking and delivering vehicle has the advantages of being simple in structure, reasonable in design, convenient to use, capable of achieving one-time taking and delivering of a large number of silicon wafers, high in working efficiency, good in safety and the like.

Description

technical field [0001] The disclosure of the invention relates to the technical field of silicon wafer transport equipment, in particular to a multi-silicon wafer transport pick-up vehicle. Background technique [0002] At present, the silicon wafer transportation vehicle is only used for the transportation of silicon wafers and trays. Every time the silicon wafers and trays are transported to the machine by the transport vehicle, it is necessary to manually place the silicon wafers and trays into the reaction chamber of the machine for heating. on a plate for processing. After the process is completed, it is necessary to manually remove the silicon wafer or the tray carrying the silicon wafer from the heating plate of the reaction chamber. [0003] The above method is okay for a small amount of silicon wafer processing, but for the case of multiple silicon wafers, it is not only time-consuming and laborious, but also has the risk of high temperature burns for the staff who...

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention provides a multi-silicon wafer transportation pickup and delivery vehicle to solve the problem that the previous silicon wafer transportation vehicle can only realize the transportation of silicon wafers and trays, but cannot realize the function of picking up and delivering on the machine, resulting in low production efficiency , prone to the problem of high temperature burns for staff

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