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Manufacturing method of radio frequency filter

A technology for radio frequency filters and supporting electrodes, which is applied in the field of filters, can solve the problems of high manufacturing cost of BAW devices, long manufacturing process of radio frequency filters, and high difficulty in process realization, so as to improve the competitiveness of devices and reduce the cost of devices , The effect of shortening the processing cycle

Active Publication Date: 2022-08-09
EPIC MEMS XIAMEN CO LTD
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Problems solved by technology

[0006] In order to solve the technical problems that the entire preparation process of the above-mentioned radio frequency filter is long and the process is difficult to realize, and at the same time, the application of materials, processes and equipment used in the existing preparation method leads to the high cost of manufacturing a single BAW device, etc., The disclosure provides a method for preparing a radio frequency filter

Method used

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  • Manufacturing method of radio frequency filter
  • Manufacturing method of radio frequency filter
  • Manufacturing method of radio frequency filter

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Embodiment Construction

[0073] In order to make the objectives, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below with reference to the specific embodiments and the accompanying drawings.

[0074] An aspect of the present disclosure proposes a radio frequency filter, such as Figures 1A-1C ,as well as Figures 2A-2B As shown, it includes: a substrate 110, a supporting electrode 200 and a thin film structure 300,

[0075] The support electrode 200 is protruded outwardly from the front surface of the base body 110 relative to the base body 110 ;

[0076] The thin film structure 300 is formed on the base body 110 spaced from the supporting electrode 200 , and the end surface of the top end of the supporting electrode 200 is in sealing contact with the front surface of the thin film structure 300 .

[0077] According to an embodiment of the present disclosure, for the radio frequency filter of the present disclosure, t...

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Abstract

The present disclosure provides a preparation method of a radio frequency filter. The radio frequency filter includes: a base body, a support electrode and a thin film structure. The support electrode is protruded on the front surface of the base body; The end face of the top end of the supporting electrode is in sealing contact with the front surface of the membrane structure.

Description

technical field [0001] The present disclosure relates to the technical field of filters, and in particular, to a preparation method of a radio frequency filter. Background technique [0002] With the continuous development of 5G technology, the application and demand of RF filters are continuously upgraded, and the performance requirements for RF filters are continuously improved. According to the transmission method of sound waves, radio frequency filters are usually divided into: bulk acoustic wave filters and surface acoustic wave filters. Among them, the surface acoustic wave filter generally works at a frequency below 2.5G, and the bulk acoustic wave filter works at a frequency of 1.5G to 10G. [0003] Whether it is a surface acoustic wave filter or a bulk acoustic wave filter, in order to maintain good RF performance indicators, there are certain requirements for its working environment, and a relatively closed cavity (ie a protective cavity) needs to be prepared to i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P11/00H01P1/20
CPCH01P11/007H01P1/20
Inventor 蒋将李平王伟祝明国胡念楚贾斌
Owner EPIC MEMS XIAMEN CO LTD
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