Rotor structure with long-acting operation

Abstract

The invention relates to a rotor structure with long-acting operation. The rotor structure comprises a rotor body and a plurality of rotor blades, the plurality of rotor blades are annularly arranged on the outer side of the rotor body and longitudinally distributed to form a plurality of rotor blade layers, the rotor blade layers comprise at least one first rotor blade layer and a plurality of second rotor blade layers, the trailing ends of the first rotor blade layers are separated from the side wall of an accommodating chamber of a turbo-molecular vacuum pump by a first transverse distance, the trailing ends of the second rotor blade layers are separated from the side wall of an accommodating chamber by a second transverse distance, and the first transverse distance is substantially larger than the second transverse distance, so that under the condition that the air exhaust efficiency is maintained, the rotor blades are prevented from rubbing and touching sediments on the step section of the accommodating chamber to shake in the rotating process, so that the rotor blades can be effectively prevented from being broken due to collision with other blades, the maintenance frequency is further reduced, and the purpose of long-acting operation is achieved.

Description

technical field [0001] The present invention relates to a rotor structure, in particular to a long-term operating rotor structure. Background technique [0002] In recent years, due to the vigorous development of the semiconductor industry, the demand for related equipment in the semiconductor front-end process has increased significantly. Among them, the heart component of the high vacuum system—the turbomolecular vacuum pump has become a high vacuum system component with great demand. The current turbomolecular vacuum pump can drive the rotor connected to it for vacuum pumping process. The gas molecules are driven by the rotor blades and enter the stator blades of the next layer, and the gas molecules are turned after hitting the stator blades. Then you can enter the rotor blade of the next layer. The working principle of the turbomolecular vacuum pump is to use the high-speed rotating inclined blades to make the gas molecules in the system move towards the outlet, and us...

AI Technical Summary

Problems solved by technology

However, in the chamber of the turbomolecular vacuum pump, there is still a small amount of space, such as a stepped section, which is particularly easy to accumulate dust particles.

Therefore, traditional semiconductor and other manufacturing processes often need to be shut down to remove deposits. Otherwise, the rotor blades are likely to shake when rotating at high speed due to contact with deposits, and then hit other blades and cause fragmentation. Therefore, the traditional maintenance cycle is quite short.

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