Quartz flexible accelerometer based on micro torquer and manufacturing method thereof
A technology of accelerometer and torquer, which is applied in the field of quartz flexible accelerometer and its manufacturing, can solve the problems of unsolved temperature drift and inability to realize micro-nano process compatibility, and achieve the effect of promoting high precision and suppressing temperature drift
Active Publication Date: 2021-09-17
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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Problems solved by technology
Although the above two structures have improved the stability of the device to a certain extent, they have not solved the problem of temperature drift caused by the contact between the key structural parts (quartz pendulum) and the heat source (torque coil); in addition, the preparation of the two structures is still Compatibility with micro-nano process cannot be achieved
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[0038] The present invention will be further described in detail below with reference to the accompanying drawings and examples.
[0039] like Figure 1 - Figure 2 As shown, the present invention includes a quartz flexible accelerometer of the micromatoirer including a quartz flexible tab 1, and a permanent magnet film 2, a capacitance plate 3, and a silicon group are sequentially placed in the upper and lower side of the stone-based flexible seam 1. The coil 4 is such that the stone-based flexible accelerometer is a symmetrical center of quartz flexible tab 1 as a symmetrical center, and the upper and lower sides are symmetrical, and the entire accelerometer is flat-shaped;
[0040] Wherein, the capacitor plate 3 is a silicon wafer of the single side vapor deposition Au metal layer, the thickness of the silicon wafer is not smaller than the thickness of the permanent magnet film 2, and the center of the wafer is opened, and the hollow portion is larger than the radial direction of...
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The invention discloses a quartz flexible accelerometer based on a miniature torquer and a manufacturing method thereof. The accelerometer includes a quartz flexible pendulum piece, and a permanent magnet film, a capacitor Pole plate and silicon-based coil, so that the quartz flexible accelerometer is formed into a push-pull structure with the quartz flexible pendulum as the symmetrical center and the upper and lower sides are symmetrical, and the whole accelerometer is in a flat shape. The manufacturing method includes the following steps: S1. Micro-nano processing to prepare quartz flexible pendulum; S2. Preparation of multi-pole magnetized permanent magnet film; S3. Micro-nano processing to prepare capacitor plates; S4. Micro-nano processing to prepare silicon-based coils ; S5. Integrating a quartz flexible pendulum, a permanent magnetic film, a capacitor plate and a silicon-based coil to form an accelerometer. The invention can alleviate the problem of temperature drift in the existing quartz flexible accelerometer, and at the same time realize the compatibility of device preparation and micro-nano technology, and is beneficial to promote the development of high-precision and miniaturized quartz flexible accelerometer in my country.
Description
Technical field [0001] The present invention belongs to the microbial sensor technology, and in particular, the present invention relates to a quartz flexible accelerometer based on a micro-torque converter and a method of manufacturing the same. Background technique [0002] As a mainstream engineering application accelerometer, quartz flexible accelerometer is widely used in the navigation and control system of aerospace, aviation, weapons. [0003] Conventional quartz flexible accelerometers include upper yoke assemblies - quartz temple components - the three parts of the lower yoke assembly. On the upper, the lower yoke assembly consists of a part of magnet, magnetic pole cap, and yoke, which constitutes a closed loop magnetic circuit, providing a gas gap magnetic field; the quartz assembly consists of quartz pavilum and bonded on the torque coil of the bilateral. Due to the large reasons of the yoke assembly parts, key structural parts (quartz pavilion) and heat source (torq...
Claims
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IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 王月支钞屈明山李严军李枚
Owner INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS