Production method of tubular target material

A production method and tube type technology, applied in the production field of tube type targets, can solve the problems of uneven powder distribution, low efficiency, and increased work complexity, etc., to increase the contact range, ensure uniformity, and change vibration real range effect

Active Publication Date: 2021-08-20
WUHU YINGRI TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] (1) The existing vibrating platform or other vibrating equipment can only vibrate the powder in one mold at a time, which is inefficient and requires frequent loading and unloading of the mold by the staff, which increases the work the complexity of
[0005] (2) Since the position of the mold is fixed after installation, the vibration amplitude generated by the vibration platform or other vibration equipment on different positions of the mold is different, resulting in uneven distribution of the powder in the mold

Method used

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  • Production method of tubular target material

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Embodiment Construction

[0040] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention can be implemented in many different ways defined and covered by the claims.

[0041] Such as Figure 1 to Figure 9 As shown, a production method of a tubular target material uses a powder vibration equipment, the powder vibration equipment includes a bottom plate 1, a workbench 2, a fixing device 3 and a vibration device 4, using the above powder The specific method flow of the material vibrating equipment to produce tubular targets is as follows:

[0042] S1 powder weighing: choose molybdenum powder with a Fischer particle size of 2-5um, and weigh it according to actual needs;

[0043] S2 powder filling: the molybdenum powder after weighing is filled in the tubular mold, and it is fully vibrated by the powder vibrating equipment;

[0044] S3 Compression preforming: Seal the tube mold that has been vacuumized by sealing and...

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Abstract

The invention relates to a production method of a tubular target material, which uses powder compaction equipment. The powder compaction equipment comprises a bottom plate, a workbench, a fixing device and a compaction device. The specific process of the method for producing the tubular target material by adopting the powder compaction equipment is as follows: powder weighing, powder filling, compression preforming, demolding, heat treatment and machining. The compaction device comprises supporting rods, a top plate, a driving motor, a driving cam, transverse moving blocks, lifting blocks, pressing rings, internal compaction frames, a fixing column and external compaction frames. According to the technical scheme, a plurality of tubular moulds are fixed through a material placing device, then compaction operation is respectively carried out from the upper parts, the inner parts and the outer parts of the moulds through the compaction device, so that the compaction efficiency is obviously improved, meanwhile, the tubular moulds can be driven to rotate in the compaction process, so that the contact range of the compaction device and the tubular moulds can be enlarged, and the compaction effect is improved.

Description

technical field [0001] The invention relates to the technical field of target material production, in particular to a production method of a tubular target material. Background technique [0002] The target material is one of the main materials for preparing thin films. It is mainly used in integrated circuits, flat panel displays, solar cells, recording media, smart glass, etc., and has high requirements for material purity and stability. [0003] Targets can be divided into tubular targets, cylindrical targets and semicircular targets according to different shapes. During the production process of tubular targets, after pouring the powder into the tubular mold, it is necessary to The powder is vibrated to ensure the filling tightness of the powder, but there are still some problems in the vibration process: [0004] (1) The existing vibrating platform or other vibrating equipment can only vibrate the powder in one mold at a time, which is inefficient and requires frequent...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F5/12B22F3/093B22F3/03
CPCB22F3/03B22F3/093B22F5/106
Inventor 曾墩风罗永春王志强
Owner WUHU YINGRI TECH CO LTD
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