Production method of tubular target material

Abstract

The invention relates to a production method of a tubular target material, which uses powder compaction equipment. The powder compaction equipment comprises a bottom plate, a workbench, a fixing device and a compaction device. The specific process of the method for producing the tubular target material by adopting the powder compaction equipment is as follows: powder weighing, powder filling, compression preforming, demolding, heat treatment and machining. The compaction device comprises supporting rods, a top plate, a driving motor, a driving cam, transverse moving blocks, lifting blocks, pressing rings, internal compaction frames, a fixing column and external compaction frames. According to the technical scheme, a plurality of tubular moulds are fixed through a material placing device, then compaction operation is respectively carried out from the upper parts, the inner parts and the outer parts of the moulds through the compaction device, so that the compaction efficiency is obviously improved, meanwhile, the tubular moulds can be driven to rotate in the compaction process, so that the contact range of the compaction device and the tubular moulds can be enlarged, and the compaction effect is improved.

Description

technical field [0001] The invention relates to the technical field of target material production, in particular to a production method of a tubular target material. Background technique [0002] The target material is one of the main materials for preparing thin films. It is mainly used in integrated circuits, flat panel displays, solar cells, recording media, smart glass, etc., and has high requirements for material purity and stability. [0003] Targets can be divided into tubular targets, cylindrical targets and semicircular targets according to different shapes. During the production process of tubular targets, after pouring the powder into the tubular mold, it is necessary to The powder is vibrated to ensure the filling tightness of the powder, but there are still some problems in the vibration process: [0004] (1) The existing vibrating platform or other vibrating equipment can only vibrate the powder in one mold at a time, which is inefficient and requires frequent...

AI Technical Summary

Problems solved by technology

[0004] (1) The existing vibrating platform or other vibrating equipment can only vibrate the powder in one mold at a time, which is inefficient and requires frequent loading and unloading of the mold by the staff, which increases the work the complexity of

[0005] (2) Since the position of the mold is fixed after installation, the vibration amplitude generated by the vibration platform or other vibration equipment on different positions of the mold is different, resulting in uneven distribution of the powder in the mold

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