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Temperature sensor and on-chip high-precision calibration method thereof

A technology of temperature sensor and calibration method, applied in the direction of thermometer test/calibration, thermometer, thermometer with directly sensitive electric/magnetic components, etc., can solve problems such as calibration error, and achieve the effect of high-precision calibration scheme

Pending Publication Date: 2021-09-03
上海料聚微电子有限公司
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Problems solved by technology

Due to variations in process parameters and V BE Intrinsic temperature characteristics, V BE with ΔV BE The proportional value Y of the temperature coefficient will change with temperature, which will cause calibration errors, which is unacceptable in temperature sensor applications with relatively high accuracy requirements

Method used

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  • Temperature sensor and on-chip high-precision calibration method thereof
  • Temperature sensor and on-chip high-precision calibration method thereof
  • Temperature sensor and on-chip high-precision calibration method thereof

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Embodiment Construction

[0032] In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments It is a part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0033] The invention provides a temperature sensor and its on-chip high-precision calibration method, the first voltage signal V can be determined by the two-temperature method 1 , the second voltage signal V 2 The accurate calibration values ​​of the slope and intercept in the first-order linear expression of the first-order linear expression can ac...

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Abstract

The invention discloses a temperature sensor and an on-chip high-precision calibration method thereof. The on-chip high-precision calibration method of the temperature sensor comprises the following steps: respectively determining first-order linear expressions of a first voltage signal V1, a second voltage signal V2 and a temperature value T; according to a first-order linear expression of the first voltage signal V1 and a first-order linear expression of the second voltage signal V2, obtaining a relational expression of a temperature value T, a quantitative ratio Y and a calibration parameter through derivation; and multiplexing the temperature sensor, measuring values of the first voltage signal V1 and the second voltage signal V2 at two temperatures T1 and T2, and calculating to obtain an accurate value of the calibration parameter, thereby completing on-chip calibration of the temperature sensor.

Description

technical field [0001] The invention relates to the technical field of integrated circuits, in particular to a temperature sensor and an on-chip high-precision calibration method thereof. Background technique [0002] Since CMOS temperature sensors are widely used, and different application scenarios have various environments, various corresponding challenges are also proposed for the design of temperature sensors. In mass production, due to unavoidable process deviation, different batches of CMOS temperature sensor parameters are different, even for different chips of the same batch. In order to ensure sufficient temperature measurement accuracy and yield, it is often necessary to perform factory calibration on temperature sensors one by one. However, the calibration accuracy of a temperature sensor depends on the accuracy of the reference temperature. On the one hand, it is necessary to keep the ambient temperature of the temperature sensor stable during calibration, and...

Claims

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Application Information

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IPC IPC(8): G01K15/00G01K7/01
CPCG01K15/005G01K7/01
Inventor 李小勇李威
Owner 上海料聚微电子有限公司
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