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Mask frame, mask module and evaporation equipment

A mask and frame technology, applied in the field of mask modules and evaporation equipment, mask frames

Active Publication Date: 2021-09-07
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Embodiments of the present disclosure provide a mask frame, mask module and evaporation equipment to solve or alleviate one or more of the prior art technical issue

Method used

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  • Mask frame, mask module and evaporation equipment
  • Mask frame, mask module and evaporation equipment
  • Mask frame, mask module and evaporation equipment

Examples

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Embodiment Construction

[0034] In the following, only some exemplary embodiments are briefly described. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present disclosure. Accordingly, the drawings and descriptions are to be regarded as illustrative in nature and not restrictive.

[0035] Such as figure 1 As shown, in the organic evaporation coating technology for organic light emitting diode (Organic Light Emitting Diode, OLED), usually the mask plate 110 is installed on one side of the mask plate frame 120, and the mask plate 110 is away from the mask A substrate to be evaporated 130 is disposed on one side of the stencil frame 120 , and the organic material 140 is heated to volatilize at a high temperature, and then vaporized on the substrate to be evaporated 130 through the opening 111 of the mask 110 in a molecular state. However, since the mask frame 120 is prone to warping du...

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PUM

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Abstract

The embodiment of the invention provides a mask frame, a mask module and evaporation equipment. The mask frame comprises a first frame body, the first frame body is provided with a first plane, a second plane and a plurality of first connecting holes, the first plane and the second plane are arranged in parallel, the first connecting holes are arranged in the circumferential direction of the first frame body at intervals, and the first connecting holes penetrate through the first plane and the second plane; a second frame body which is arranged on one side of the first frame body, and a plane, deviating from the first frame body, of the second frame body forms a fixing plane used for fixing a mask; and a plurality of connecting columns, wherein each connecting column penetrates through each first connecting hole and is detachably connected with the second frame body. According to the technical scheme, the flatness of the mask frame can be effectively improved.

Description

technical field [0001] The present disclosure relates to the technical field of evaporation technology, in particular to a mask frame, a mask module and evaporation equipment. Background technique [0002] Currently, mask frames are prone to warping during transportation or use, reducing their flatness. Contents of the invention [0003] Embodiments of the present disclosure provide a mask frame, a mask module and an evaporation device to solve or alleviate one or more technical problems in the prior art. [0004] As an aspect of the embodiments of the present disclosure, the embodiments of the present disclosure provide a mask frame, including: [0005] The first frame body has a first plane and a second plane arranged in parallel, and a plurality of first connection holes arranged at intervals along the circumferential direction of the first frame body, wherein each first connection hole penetrates the first plane and the second plane. flat; [0006] The second frame ...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24C23C14/54
CPCC23C14/042C23C14/24C23C14/54
Inventor 徐光华黄世雄谢涛峰
Owner BOE TECH GRP CO LTD
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