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Micro-electro-mechanical system (MEMS) accelerometer

A technology of micro-electronic machinery and accelerometer, which is applied to the components of TV systems, micro-electronic microstructure devices, speed/acceleration/shock measurement, etc., and can solve the problems of inconvenient disassembly and assembly of the shell and poor electronic shielding effect of the shell, etc. question

Pending Publication Date: 2021-09-14
DONGGUAN UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention proposes a microelectromechanical system MEMS accelerometer, which is used to solve the problem that the existing MEMS accelerometer in the background technology is inconvenient to disassemble and assemble when it is actually used, and the electronic shielding effect of the shell is poor. technical problem

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  • Micro-electro-mechanical system (MEMS) accelerometer
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  • Micro-electro-mechanical system (MEMS) accelerometer

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Embodiment Construction

[0026] In describing the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", " The orientation or positional relationship indicated by "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, so as to Specific orientation configurations and operations, therefore, are not to be construed as limitations on the invention.

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0028] refer to Figure ...

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Abstract

The present invention discloses an MEMS accelerometer which comprises a bottom plate and an MSME accelerometer body, the MSME accelerometer body is arranged at the upper end of the bottom plate, a shell is arranged at the upper end of the bottom plate, and the lower end of the shell is movably connected with the upper end, close to the left side and the right side, of the bottom plate in a clamped mode. The shell is arranged on the bottom plate, the two fixing blocks are inserted into the cavities correspondingly, the pressure springs drive the hook-shaped clamping blocks to be inserted into the limiting clamping grooves, the shell is effectively clamped and fixed, and disassembly and assembly are convenient, so that the electromagnetic shielding sheet is arranged in the rectangular opening, so that the electromagnetic shielding sheet provides effective electromagnetic shielding for the MSME accelerometer body, and the dustproof flexible sheet is inserted into the strip-shaped slot in the rectangular opening, so that the dustproof flexible sheet is effectively limited and fixed; and therefore, the dustproof soft sheet is matched with the fan-shaped dust blocking sheet and the rectangular annular gasket in the wiring through hole to provide effective dustproof protection for the MSME accelerometer body in the shell.

Description

technical field [0001] The invention relates to the technical field of MEMS accelerometers, in particular to a MEMS accelerometer for micro-electromechanical systems. Background technique [0002] An accelerometer is an inertial sensor that can measure the acceleration of an object. MEMS is a technology that integrates microelectronics technology and mechanical engineering. MEMS accelerometers are accelerometers manufactured using MSME technology. MEMS accelerometers use microelectromechanical systems technology. With the advantages of small size, light weight and low energy consumption, MEMS micro-accelerometers include piezoresistive micro-accelerometers, capacitive micro-accelerometers and torsional micro-accelerometers. [0003] When the existing MEMS accelerometer is actually used, its housing is inconvenient to disassemble, and the electronic shielding effect of the housing is poor. A micro-electromechanical system MEMS accelerometer is proposed to solve the above prob...

Claims

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Application Information

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IPC IPC(8): B81B7/02B81B7/00
CPCB81B7/02B81B7/0032B81B7/0064B81B7/0093B81B2201/0235
Inventor 王福杰秦毅郭芳任斌姜鸣胡耀华姚智伟
Owner DONGGUAN UNIV OF TECH