Evaporation device
A technology for vapor deposition and vapor deposition of materials, which is applied in the directions of vacuum evaporation coating, sputtering coating, ion implantation coating, etc. The problems of low deposition efficiency and evaporation quality can be achieved to improve heating efficiency, evaporation efficiency and evaporation quality.
Pending Publication Date: 2021-09-17
SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
In the evaporation process, the evaporation mask is used to cover the substrate, and the evaporation material is evaporated from the opening of the evaporation mask to the corresponding substrate. However, point sources and line sources are usually used at present, so point sources or Only when the line source and the substrate move relative to each other can the substrate be evaporated, which will not only reduce the evaporation efficiency, but also cause the evaporation material to be ejected from the evaporation port at different positions due to the movement of the point source or the line source. Interacting with each other, it will eventually lead to uneven thickness of the organic film
That is to say, the evaporation efficiency and evaporation quality of the existing point source and line source are low
Method used
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[0043] The present application will be described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.
[0044] In the description of the embodiments of this application, unless otherwise specified and limited, the terms "first" and "second" are only used for the purpose of description, and cannot be understood as indicating or implying relative importance; unless otherwise specified Or to explain, the term "plurality" refers to two or more; the terms "connection", "fixation" and so on should be understood in a broad sense, for example, "connection" can be a fixed connection or a detachable connection, or Connected integrally, or electrically; either directly or indirectly through an intermediary. Those of ordinary skill in the art can understand the specific meanings of the above...
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The invention relates to the technical field of evaporation, in particular to an evaporation device. The evaporation device comprises a crucible and a cover plate. A plurality of holding grooves used for holding evaporation materials are formed inside the crucible, a heating groove is formed between every two adjacent holding grooves, the heating grooves are formed outside the crucible, and heating pieces are arranged on the outer surfaces of the holding grooves and the heating grooves. The cover plate is arranged on the crucible in a covering mode, and a plurality of evaporation opening parts which are used for spraying out the evaporation materials are arranged on the cover plate. According to the evaporation device, the heating grooves are formed outside the crucible, each heating groove is formed between the two corresponding and adjacent holding grooves, the heating pieces are arranged on the outer surfaces of the holding grooves and the heating grooves, and therefore the heating efficiency of the evaporation materials in each holding groove can be improved, and the evaporation efficiency and the evaporation quality can be improved.
Description
technical field [0001] The present application relates to the technical field of evaporation, and in particular to an evaporation device. Background technique [0002] In the OLED panel preparation process, the evaporation process is a key process. In the evaporation process, the evaporation mask is used to cover the substrate, and the evaporation material is evaporated from the opening of the evaporation mask to the corresponding substrate. However, point sources and line sources are usually used at present, so point sources or Only when the line source and the substrate move relative to each other can the substrate be evaporated, which will not only reduce the evaporation efficiency, but also cause the evaporation material to be ejected from the evaporation port at different positions due to the movement of the point source or the line source. Interacting with each other will eventually lead to uneven thickness of the organic film. That is to say, the vapor deposition ef...
Claims
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Login to View More IPC IPC(8): C23C14/24C23C14/04C23C14/12
CPCC23C14/243C23C14/042C23C14/12
Inventor 林文晶轩景泉钱海涛赵军刘萍
Owner SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD