Nested scanning probe microscope
A technology of scanning probe and microscope, which is applied in the field of scanning probe microscopy, can solve the problem of large space occupation in the stepping direction of the motor, and achieve the effects of reducing thermal drift, compact structure, and high space utilization
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[0024] The technical solutions provided by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0025] like figure 1 Shown is the first embodiment, the nested scanning probe microscope includes a housing 1, and also includes a stepping motor, an insulating tube 3, an insulating weight frame 4 and a scanning head that are sequentially sleeved coaxially along an axial direction. 5.
[0026] The stepper motor is a piezoelectric tube 2, the piezoelectric tube 2 is a hollow tubular structure, the piezoelectric tube 2 has a fixed end 10 and a free end 11 opposite to each other, and the insulating tube 3 wraps around the The axial direction is circumferentially arranged on the inner wall of the free end 11 , and the outer wall of the fixed end 10 is bonded and fixed on the housing 1 through the fixing block 6 .
[0027] The insulating tube 3 is glued and fixed on the free end 11; an elastic member 7 is arranged between the inner w...
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Abstract
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