Nested scanning probe microscope

A technology of scanning probe and microscope, which is applied in the field of scanning probe microscopy, can solve the problem of large space occupation in the stepping direction of the motor, and achieve the effects of reducing thermal drift, compact structure, and high space utilization

Active Publication Date: 2021-09-17
NANJING UNIV OF INFORMATION SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But none of the above-mentioned known patents solves the problem that the motor takes up a lot of space in the stepping direction

Method used

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  • Nested scanning probe microscope
  • Nested scanning probe microscope
  • Nested scanning probe microscope

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Embodiment Construction

[0024] The technical solutions provided by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025] like figure 1 Shown is the first embodiment, the nested scanning probe microscope includes a housing 1, and also includes a stepping motor, an insulating tube 3, an insulating weight frame 4 and a scanning head that are sequentially sleeved coaxially along an axial direction. 5.

[0026] The stepper motor is a piezoelectric tube 2, the piezoelectric tube 2 is a hollow tubular structure, the piezoelectric tube 2 has a fixed end 10 and a free end 11 opposite to each other, and the insulating tube 3 wraps around the The axial direction is circumferentially arranged on the inner wall of the free end 11 , and the outer wall of the fixed end 10 is bonded and fixed on the housing 1 through the fixing block 6 .

[0027] The insulating tube 3 is glued and fixed on the free end 11; an elastic member 7 is arranged between the inner w...

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Abstract

The invention discloses a nested scanning probe microscope. The nested scanning probe microscope comprises a shell, and further comprises a stepping motor, an insulating tube, an insulating counterweight frame and a scanning head which are sequentially and coaxially sleeved with one another along an axial direction; the stepping motor is installed on the inner wall of the shell, and the insulating tube is arranged on the inner wall of the stepping motor in the circumferential direction; an elastic piece is arranged between the outer wall of the insulating counterweight frame and the insulating tube, and the insulating counterweight frame is in sliding fit with the inner wall of the insulating tube through the stress of the elastic piece; the scanning head is mounted on the insulating counterweight frame and is provided with a test end, and the test end comprises a probe for scanning a sample; and the stepping motor is used for driving the insulating counterweight frame and the scanning head to step along the axial direction. The nested scanning probe microscope has the advantages of compact structure, small size and high space utilization rate, has the characteristics of interference resistance and high symmetry, and can reduce thermal drift caused by temperature change and improve the quality of scanning imaging.

Description

technical field [0001] The invention relates to the technical field of scanning probe microscopes, in particular to a nested scanning probe microscope. Background technique [0002] Scanning probe microscope (SPM), because of its unique and excellent microscopic characterization ability, has been widely used in various research fields. It has become an important tool for exploring the microscopic world, and it is also an important means for people to manipulate and transform atoms and molecules. With the development of science and technology and the expansion of SPM application scenarios, the SPM structure is gradually optimized. And an SPM mirror body with compact structure, strong rigidity, vibration resistance, small volume, small thermal drift, high space utilization rate, especially high utilization rate of piezoelectric materials, has become the goal that scientists are constantly pursuing. [0003] A scanning probe microscope usually includes three core components: a...

Claims

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Application Information

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IPC IPC(8): G01Q60/00H02N2/00H02N2/10
CPCG01Q60/00H02N2/00H02N2/101
Inventor 郭颖张徐开王佳丽赵兴强
Owner NANJING UNIV OF INFORMATION SCI & TECH
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