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Ultrasonic scanning microscope global focusing method and device combined with depth camera

A technology of depth camera and ultrasonic scanning, which is applied in the direction of measuring device, using sound wave/ultrasonic wave/infrasonic wave to analyze solids, and using sound wave/ultrasonic wave/infrasonic wave to analyze materials, etc. It can solve the problems of automatic focusing of difficult-to-warp samples and achieve sample detection fast effect

Pending Publication Date: 2021-10-01
ZHEJIANG LAB
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Problems solved by technology

[0006] The purpose of the embodiments of the present invention is to provide a global focusing method and device for an ultrasonic scanning microscope combined with a depth camera to solve the technical problem that traditional high-resolution ultrasonic scanning microscopes are difficult to automatically focus on warped samples

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  • Ultrasonic scanning microscope global focusing method and device combined with depth camera
  • Ultrasonic scanning microscope global focusing method and device combined with depth camera
  • Ultrasonic scanning microscope global focusing method and device combined with depth camera

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Embodiment Construction

[0027] In order to make the above-mentioned purpose, features and advantages of the present application more obvious and understandable, the specific implementation manners of the present application will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, the present application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific implementation disclosed below.

[0028] figure 1 It is a flow chart of a global focusing method for an ultrasonic scanning microscope combined with a depth camera according to an exemplary embodiment. An embodiment of the present invention provides a global focusing method...

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Abstract

The invention discloses an ultrasonic scanning microscope global focusing method and device combined with a depth camera. The method comprises the steps of acquiring a three-dimensional coordinate matrix of the upper surface of a sample through the depth camera; according to the three-dimensional coordinate matrix, calculating a coordinate position point matrix of the moving position of the ultrasonic probe, wherein the coordinate position point matrix is composed of a plurality of coordinate position points; and controlling an XYZ displacement table according to the coordinate position point matrix so as to enable the ultrasonic probe to sequentially move to the coordinate position points to complete global focusing. The depth camera can obtain the three-dimensional image of the sample in an extremely short time, and then the bent and inclined sample can be clearly and uniformly imaged only through one-time formal scanning.

Description

technical field [0001] The invention relates to the field of ultrasonic scanning microscopes, in particular to a global focusing method and device for an ultrasonic scanning microscope combined with a depth camera. Background technique [0002] A scanning ultrasonic microscope is a device that uses ultrasonic waves to microscopically image a sample. Since ultrasonic waves can penetrate the surface of samples, ultrasonic scanning microscopes can directly image the internal structure of samples, so they are widely used in the field of non-destructive testing, such as chip packaging defect detection, wafer bonding defect detection, composite material detection, welding detection, etc. The ultrasonic microscope focuses the pulsed ultrasonic waves inside the sample, and the received pulse echo contains the material properties and height information of the sample. By performing point-by-point linear scanning on the horizontal plane, the cross-sectional morphology and three-dimens...

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Application Information

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IPC IPC(8): G01N29/06G01N29/265
CPCG01N29/0681G01N29/265
Inventor 尹永刚施钧辉任丹阳王钰琪陈睿黾李驰野
Owner ZHEJIANG LAB
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